Rapid optical thermal processing of silicon solar cells
Rapid thermal processing has been applied to silicon solar cell technology by using large area optical heaters which are suitable for continuous processing. All important processing steps to make solar cells have been realized by RTP methods: spin-on emitters, Al-BSF with low recombination rates and...
Saved in:
| Published in: | IEEE Twenty Third Photovoltaic Specialists Conference, 1993 pp. 162 - 166 |
|---|---|
| Main Authors: | , , , , , , , , , , |
| Format: | Conference Proceeding Journal Article |
| Language: | English |
| Published: |
IEEE
1993
|
| Subjects: | |
| ISBN: | 0780312201, 9780780312203 |
| Online Access: | Get full text |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!

