Rapid optical thermal processing of silicon solar cells

Rapid thermal processing has been applied to silicon solar cell technology by using large area optical heaters which are suitable for continuous processing. All important processing steps to make solar cells have been realized by RTP methods: spin-on emitters, Al-BSF with low recombination rates and...

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Bibliographic Details
Published in:IEEE Twenty Third Photovoltaic Specialists Conference, 1993 pp. 162 - 166
Main Authors: Schindler, R., Reis, I., Wagner, B., Eyer, A., Lautenschlager, H., Schetter, C., Warta, W., Hartiti, B., Slaoui, A., Muller, J.C., Siffert, P.
Format: Conference Proceeding Journal Article
Language:English
Published: IEEE 1993
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ISBN:0780312201, 9780780312203
Online Access:Get full text
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