Rapid optical thermal processing of silicon solar cells

Rapid thermal processing has been applied to silicon solar cell technology by using large area optical heaters which are suitable for continuous processing. All important processing steps to make solar cells have been realized by RTP methods: spin-on emitters, Al-BSF with low recombination rates and...

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Vydané v:IEEE Twenty Third Photovoltaic Specialists Conference, 1993 s. 162 - 166
Hlavní autori: Schindler, R., Reis, I., Wagner, B., Eyer, A., Lautenschlager, H., Schetter, C., Warta, W., Hartiti, B., Slaoui, A., Muller, J.C., Siffert, P.
Médium: Konferenčný príspevok.. Journal Article
Jazyk:English
Vydavateľské údaje: IEEE 1993
Predmet:
Aluminum
Etching
Furnaces
Heat transfer
Optical films
Photovoltaic cells
Rapid thermal processing
Silicon
Stimulated emission
Temperature
ISBN:0780312201, 9780780312203
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Shrnutí:Rapid thermal processing has been applied to silicon solar cell technology by using large area optical heaters which are suitable for continuous processing. All important processing steps to make solar cells have been realized by RTP methods: spin-on emitters, Al-BSF with low recombination rates and passivating oxides. The influence of the RTP has been investigated for the single steps as well as for a combination of several RTP steps. Although the individual process steps are not optimized yet, solar cells of 16.6% efficiency were fabricated.< >
Bibliografia:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISBN:0780312201
9780780312203
DOI:10.1109/PVSC.1993.347060