Input–Output-Improved Reservoir Computing Based on Duffing Resonator Processing Dynamic Temperature Compensation for MEMS Resonant Accelerometer

An MEMS resonant accelerometer is a temperature-sensitive device because temperature change affects the intrinsic resonant frequency of the inner silicon beam. Most classic temperature compensation methods, such as algorithm modeling and structure design, have large errors under rapid temperature ch...

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Veröffentlicht in:	Micromachines (Basel) Jg. 14; H. 1; S. 161
Hauptverfasser:	Guo, Xiaowei, Yang, Wuhao, Zheng, Tianyi, Sun, Jie, Xiong, Xingyin, Wang, Zheng, Zou, Xudong
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	Switzerland MDPI AG 08.01.2023 MDPI
Schlagworte:	Accelerometers Accuracy algorithm optimization Algorithms dynamic temperature compensation Edge computing Feasibility studies MEMS resonant accelerometer Microelectromechanical systems nonlinear MEMS resonator Optimization Polynomials Real time reservoir computing Resonant frequencies Resonators Sensors Silicon Software Temperature compensation reservoir computing algorithm optimization MEMS resonant accelerometer nonlinear MEMS resonator dynamic temperature compensation
ISSN:	2072-666X, 2072-666X
Online-Zugang:	Volltext
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