X-ray nano-holotomography reconstruction with simultaneous probe retrieval

In conventional tomographic reconstruction, the pre-processing step includes flat-field correction, where each sample projection on the detector is divided by a reference image taken without the sample. When using coherent X-rays as a probe, this approach overlooks the phase component of the illumin...

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Bibliographic Details
Published in:Optics express Vol. 32; no. 23; p. 41905
Main Authors: Nikitin, Viktor, Carlsson, Marcus, Gürsoy, Doğa, Mokso, Rajmund, Cloetens, Peter
Format: Journal Article
Language:English
Published: United States Optical Society of America - OSA Publishing 04.11.2024
Optical Society of America
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ISSN:1094-4087, 1094-4087
Online Access:Get full text
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Summary:In conventional tomographic reconstruction, the pre-processing step includes flat-field correction, where each sample projection on the detector is divided by a reference image taken without the sample. When using coherent X-rays as a probe, this approach overlooks the phase component of the illumination field (probe), leading to artifacts in phase-retrieved projection images, which are then propagated to the reconstructed 3D sample representation. The problem intensifies in nano-holotomography with focusing optics, which, due to various imperfections creates high-frequency components in the probe function. Here, we present a new iterative reconstruction scheme for holotomography, simultaneously retrieving the complex-valued probe function. Implemented on GPUs, this algorithm results in 3D reconstruction resolving twice thinner layers in a 3D ALD standard sample measured using nano-holotomography.
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content type line 23
AC02-06CH11357
USDOE Office of Science (SC), Basic Energy Sciences (BES)
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.537341