X-ray nano-holotomography reconstruction with simultaneous probe retrieval
In conventional tomographic reconstruction, the pre-processing step includes flat-field correction, where each sample projection on the detector is divided by a reference image taken without the sample. When using coherent X-rays as a probe, this approach overlooks the phase component of the illumin...
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| Veröffentlicht in: | Optics express Jg. 32; H. 23; S. 41905 |
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| Hauptverfasser: | , , , , |
| Format: | Journal Article |
| Sprache: | Englisch |
| Veröffentlicht: |
United States
Optical Society of America - OSA Publishing
04.11.2024
Optical Society of America |
| Schlagworte: | |
| ISSN: | 1094-4087, 1094-4087 |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | In conventional tomographic reconstruction, the pre-processing step includes flat-field correction, where each sample projection on the detector is divided by a reference image taken without the sample. When using coherent X-rays as a probe, this approach overlooks the phase component of the illumination field (probe), leading to artifacts in phase-retrieved projection images, which are then propagated to the reconstructed 3D sample representation. The problem intensifies in nano-holotomography with focusing optics, which, due to various imperfections creates high-frequency components in the probe function. Here, we present a new iterative reconstruction scheme for holotomography, simultaneously retrieving the complex-valued probe function. Implemented on GPUs, this algorithm results in 3D reconstruction resolving twice thinner layers in a 3D ALD standard sample measured using nano-holotomography. |
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| Bibliographie: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 AC02-06CH11357 USDOE Office of Science (SC), Basic Energy Sciences (BES) |
| ISSN: | 1094-4087 1094-4087 |
| DOI: | 10.1364/OE.537341 |