CMOS-Based High-Density Silicon Microprobe Arrays for Electronic Depth Control in Intracortical Neural Recording-Characterization and Application
This paper reports on the characterization and intracortical recording performance of high-density complementary-metal-oxide-semiconductor (CMOS)-based silicon microprobe arrays. They comprise multiplexing units integrated on the probe shafts being part of the signal transmission path. Their electri...
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| Veröffentlicht in: | Journal of microelectromechanical systems Jg. 21; H. 6; S. 1426 - 1435 |
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| Sprache: | Englisch |
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New York, NY
IEEE
01.12.2012
Institute of Electrical and Electronics Engineers |
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| ISSN: | 1057-7157, 1941-0158 |
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| Abstract | This paper reports on the characterization and intracortical recording performance of high-density complementary-metal-oxide-semiconductor (CMOS)-based silicon microprobe arrays. They comprise multiplexing units integrated on the probe shafts being part of the signal transmission path. Their electrical characterization reveals a negligible contribution on the electrode impedances of 139 ±11 kΩ and 1.2 ±0.1 MΩ and on the crosstalks of 0.12% and 0.98% for iridium oxide ( IrO x ) and platinum (Pt) electrodes, respectively. The power consumption of the single-shaft probe was found to be 57.5 μW during electrode selection. The noise voltage of the switches was determined to be 5.6 nV/√Hz; it does not measurably affect the probe performance. The recording selectivity of the electrode array is demonstrated by electrical potential measurements in saline solution while injecting a stimulating current using an external probe. In-vivo recordings in anesthetized rats using all 188 electrodes with a pitch of 40.7 μm are presented and analyzed in terms of single neural activity and signal-to-noise ratio. The concept of electronic depth control is proven by performing mechanical translation of the probe shaft while electronically switching to adjacent electrodes to compensate the mechanical shift. |
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| AbstractList | This paper reports on the characterization and intracortical recording performance of high-density complementary-metal-oxide-semiconductor (CMOS)-based silicon microprobe arrays. They comprise multiplexing units integrated on the probe shafts being part of the signal transmission path. Their electrical characterization reveals a negligible contribution on the electrode impedances of 139 ±11 kΩ and 1.2 ±0.1 MΩ and on the crosstalks of 0.12% and 0.98% for iridium oxide ( IrO x ) and platinum (Pt) electrodes, respectively. The power consumption of the single-shaft probe was found to be 57.5 μW during electrode selection. The noise voltage of the switches was determined to be 5.6 nV/√Hz; it does not measurably affect the probe performance. The recording selectivity of the electrode array is demonstrated by electrical potential measurements in saline solution while injecting a stimulating current using an external probe. In-vivo recordings in anesthetized rats using all 188 electrodes with a pitch of 40.7 μm are presented and analyzed in terms of single neural activity and signal-to-noise ratio. The concept of electronic depth control is proven by performing mechanical translation of the probe shaft while electronically switching to adjacent electrodes to compensate the mechanical shift. |
| Author | Neves, H. P. Ulbert, I. Paul, O. Seidl, K. Schwaerzle, M. Ruther, P. |
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| Keywords | Microprobe Multiplexing Energy consumption Crosstalk Central nervous system Data transmission electrode selection Shafts Platinum Complementary MOS technology Complementary-metal-oxide-semiconductor (CMOS) circuitry noise Silicon Microsensors Microelectromechanical device Microelectrodes potential measurements Signal-to-noise ratio CMOS MEMS high-density electrode array In vivo Electrical measurement neural recording silicon microprobes electrode impedances |
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| SubjectTerms | Applied sciences CMOS integrated circuits CMOS MEMS Complementary-metal-oxide-semiconductor (CMOS) circuitry Crosstalk electrode impedances electrode selection Electrodes Electronics Exact sciences and technology high-density electrode array Impedance Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Micro- and nanoelectromechanical devices (mems/nems) Micromechanical devices and systems neural recording Neurons noise Physics potential measurements Probes Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Shafts silicon microprobes |
| Title | CMOS-Based High-Density Silicon Microprobe Arrays for Electronic Depth Control in Intracortical Neural Recording-Characterization and Application |
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