Practical iterated fill synthesis for CMP uniformity

We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tradeoffs between two main filling objectives: minimizing density variation, and minimizing the total amount of inserted fi...

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Bibliographic Details
Published in:	37th Design Automation Conference, 2000 pp. 671 - 674
Main Authors:	Chen, Yu, Kahng, Andrew B., Robins, Gabriel, Zelikovsky, Alexander
Format:	Conference Proceeding
Language:	English
Published:	New York, NY, USA ACM 01.01.2000 IEEE
Series:	ACM Conferences
Subjects:	Applied computing > Physical sciences and engineering > Electronics Applied computing > Physical sciences and engineering > Engineering Chemical processes Computational geometry Computer science Filling Greedy algorithms Hardware > Electronic design automation > Physical design (EDA) Hardware > Emerging technologies Hardware > Robustness Hardware > Very large scale integration design Linear programming Manufacturing processes Mathematics of computing > Mathematical analysis > Mathematical optimization > Continuous optimization > Linear programming Permission Semiconductor device modeling Solid modeling Theory of computation > Design and analysis of algorithms > Mathematical optimization > Continuous optimization > Linear programming
ISBN:	9781581131871, 1581131879
Online Access:	Get full text
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