JX Nippon Oil Energy Corp and Tokyo Institute of Technology File Patent Application for Method for Producing Mold for Fine Pattern Transfer Method for Producing Diffraction Grating Using Same and Method for Manufacturing Organic

According to the Controller General of Patents, Designs & Trade Marks, "A method for producing a mold comprises: to coat a oase (10) with a block copolymer solution (30), said block copolymer being composed o f first and second polymers; to carry out a first annealing process at a temperatu...

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Vydáno v:Indian Patents News
Médium: Newsletter
Jazyk:angličtina
Vydáno: New Delhi Athena Information Solutions Pvt. Ltd 03.02.2015
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Shrnutí:According to the Controller General of Patents, Designs & Trade Marks, "A method for producing a mold comprises: to coat a oase (10) with a block copolymer solution (30), said block copolymer being composed o f first and second polymers; to carry out a first annealing process at a temperature higher than the glass transition temperature of the block copolymer after drying the coating film; to form a microrelief structure (36) on the base by removing the second polymer by an etching process; to subject the microrelief structure (36) to a second annealing process at a temperature higher than the glass transition temperature of the first polymer; to form a seed layer (40) on the microrelief structure; to laminate a metal layer (50) on the seed layer (40) by electroforming; and to remove the metal layer (50) from the base.