Reflective Plasmonic Fano Sensor using a Double-layer Au Diffraction-grating Structure

We fabricate a reflective plasmonic Fano sensor featuring a double-layer gold (Au) diffraction-grating structure on a sapphire substrate using electron beam lithography and vacuum deposition. Ethanol serves as the analyte under 780-nm illumination. Angular reflectance measurements reveal a Fano anti...

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Veröffentlicht in:2025 30th Microoptics Conference (MOC) S. 1 - 2
Hauptverfasser: Motogaito, Atsushi, Ukai, Keita, Nabuchi, Taiyo, Kato, Takeshi, Hiramatsu, Kazumasa
Format: Tagungsbericht
Sprache:Englisch
Veröffentlicht: Japan Society of Applied Physics 12.10.2025
Schlagworte:
Electron beams
Ethanol
Gold
Plasmons
Reflectivity
Sensitivity
Sensors
Shape
Shape measurement
Substrates
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Zusammenfassung:We fabricate a reflective plasmonic Fano sensor featuring a double-layer gold (Au) diffraction-grating structure on a sapphire substrate using electron beam lithography and vacuum deposition. Ethanol serves as the analyte under 780-nm illumination. Angular reflectance measurements reveal a Fano antiresonance peak and sharp differential reflectance dip, demonstrating the sensor's liquid sensing capabilities.
DOI:10.23919/MOC65514.2025.11269196