Micro machining of micro-cantilever probes for efficient deposition for biochips

Biochip technology will bring a tremendous revolution to life science and medical research in 21 century. Microarray assays represent an essential technical advance in biomedical research. Recently, the demand for microarray assay technology has spring up. Therefore, low cost and flexible techniques...

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Bibliographic Details
Published in:Shengwu gongcheng xuebao Vol. 21; no. 2; p. 227
Main Authors: Li, Yong-Hai, Ding, Gui-Fu, Xu, Jun-Tao, Zhang, Yong-Hua
Format: Journal Article
Language:Chinese
Published: China 01.03.2005
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ISSN:1000-3061
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Summary:Biochip technology will bring a tremendous revolution to life science and medical research in 21 century. Microarray assays represent an essential technical advance in biomedical research. Recently, the demand for microarray assay technology has spring up. Therefore, low cost and flexible techniques are needed to meet specific requirements for increasingly integrated biochips. Also performance must be improved in terms of speed and sensitivity. To this end, promising approaches, mainly based on micro and nanotechnologies, have been developed. In this paper, the design and microfabrication of a novel type of micro-cantilever probe are introduced. These probes were fabricated using silicon dioxide by Micro-electromechanical System (MEMS) techniques, and they featured one micron split gap, microchannels and self-replenishing reservoirs. All fabricated micro-cantilever probe were tested on Nanoarrayer instrumentation. Cy3-streptavidin was loaded as biological sample and patterned on DSU gold surface. Results show
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ISSN:1000-3061