Rapid optical thermal processing of silicon solar cells

Rapid thermal processing has been applied to silicon solar cell technology by using large area optical heaters which are suitable for continuous processing. All important processing steps to make solar cells have been realized by RTP methods: spin-on emitters, Al-BSF with low recombination rates and...

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Veröffentlicht in:	IEEE Twenty Third Photovoltaic Specialists Conference, 1993 S. 162 - 166
Hauptverfasser:	Schindler, R., Reis, I., Wagner, B., Eyer, A., Lautenschlager, H., Schetter, C., Warta, W., Hartiti, B., Slaoui, A., Muller, J.C., Siffert, P.
Format:	Tagungsbericht Journal Article
Sprache:	Englisch
Veröffentlicht:	IEEE 1993
Schlagworte:	Aluminum Etching Furnaces Heat transfer Optical films Photovoltaic cells Rapid thermal processing Silicon Stimulated emission Temperature
ISBN:	0780312201, 9780780312203
Online-Zugang:	Volltext
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