Rapid optical thermal processing of silicon solar cells

Rapid thermal processing has been applied to silicon solar cell technology by using large area optical heaters which are suitable for continuous processing. All important processing steps to make solar cells have been realized by RTP methods: spin-on emitters, Al-BSF with low recombination rates and...

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Veröffentlicht in:IEEE Twenty Third Photovoltaic Specialists Conference, 1993 S. 162 - 166
Hauptverfasser: Schindler, R., Reis, I., Wagner, B., Eyer, A., Lautenschlager, H., Schetter, C., Warta, W., Hartiti, B., Slaoui, A., Muller, J.C., Siffert, P.
Format: Tagungsbericht Journal Article
Sprache:Englisch
Veröffentlicht: IEEE 1993
Schlagworte:
Aluminum
Etching
Furnaces
Heat transfer
Optical films
Photovoltaic cells
Rapid thermal processing
Silicon
Stimulated emission
Temperature
ISBN:0780312201, 9780780312203
Online-Zugang:Volltext
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Abstract Rapid thermal processing has been applied to silicon solar cell technology by using large area optical heaters which are suitable for continuous processing. All important processing steps to make solar cells have been realized by RTP methods: spin-on emitters, Al-BSF with low recombination rates and passivating oxides. The influence of the RTP has been investigated for the single steps as well as for a combination of several RTP steps. Although the individual process steps are not optimized yet, solar cells of 16.6% efficiency were fabricated.< >
AbstractList Rapid thermal processing has been applied to silicon solar cell technology by using large area optical heaters which are suitable for continuous processing. All important processing steps to make solar cells have been realized by RTP methods: spin-on emitters, Al-BSF with low recombination rates and passivating oxides. The influence of the RTP has been investigated for the single steps as well as for a combination of several RTP steps. Although the individual process steps are not optimized yet, solar cells of 16.6% efficiency were fabricated.< >
Rapid thermal processing has been applied to silicon solar cell technology by using large are optical heaters which are suitable for continuous processing. All important processing steps to make solar cells have been realized by RTP methods; spin-on emitters, AL-BSF with low recombination rates and passivating oxides. The influence of the RTP has been investigated for the single steps as well as for a combination of several RTP steps. Although the individual process steps are not optimized yet, solar cells of 16.6% efficiency were fabricated.
Author Wagner, B.
Eyer, A.
Lautenschlager, H.
Siffert, P.
Schetter, C.
Warta, W.
Hartiti, B.
Schindler, R.
Slaoui, A.
Reis, I.
Muller, J.C.
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SubjectTerms Aluminum
Etching
Furnaces
Heat transfer
Optical films
Photovoltaic cells
Rapid thermal processing
Silicon
Stimulated emission
Temperature
Title Rapid optical thermal processing of silicon solar cells
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