Accelerometer based on non-linear micromechanical transformer with frequency output

Basic principle measurement of frequency-resonance method by nonlinear micromechanical transformer is developed in this article. The condition for increasing sensitivity of nonlinear micromechanical transformer by movement and force is offered. There is an example of accelerometer on principle of no...

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Veröffentlicht in:Proceedings of the 2014 IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference : 3-5 February 2014 S. 89 - 91
Hauptverfasser: Kalyonov, Vladimir, Korlyakov, Andrey, Vaigachev, Aleksandr
Format: Tagungsbericht
Sprache:Englisch
Veröffentlicht: IEEE 01.02.2014
Schlagworte:
Acceleration
Accelerometers
Frequency measurement
frequency-resonance method of measurement
MEMS
micromechanical accelerometer
nonlinear micromechanical transformer
Resonant frequency
Sensors
Suspensions
Transducers
ISBN:9781479925933, 1479925934
Online-Zugang:Volltext
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Beschreibung
Zusammenfassung:Basic principle measurement of frequency-resonance method by nonlinear micromechanical transformer is developed in this article. The condition for increasing sensitivity of nonlinear micromechanical transformer by movement and force is offered. There is an example of accelerometer on principle of nonlinear micromechanical transformer and optimization its parameters is done.
ISBN:9781479925933
1479925934
DOI:10.1109/ElConRusNW.2014.6839209