Design of tunable MEMS filters for millimeter wave systems

This paper addresses the design of tunable RF MEMS (radio frequency micro-electro-mechanical systems) filters for millimeter wave applications. Based on an original topology, a tunable bandpass filter is designed in the 60 GHz frequency range. The tunable behavior is achieved using capacitive MEMS s...

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Bibliographic Details
Published in:MELECON 2006 - 2006 IEEE Mediterranean Electrotechnical Conference pp. 301 - 304
Main Authors: Takacs, A., Neculoiu, D., Vasilache, D., Muller, A., Pons, P., Bary, L., Plana, R.
Format: Conference Proceeding
Language:English
Published: IEEE 2006
Subjects:
Band pass filters
Biomembranes
Coplanar waveguides
FCC
Frequency
Micromechanical devices
Microswitches
Switches
Topology
Tunable circuits and devices
ISBN:9781424400874, 1424400872
ISSN:2158-8473
Online Access:Get full text
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Summary:This paper addresses the design of tunable RF MEMS (radio frequency micro-electro-mechanical systems) filters for millimeter wave applications. Based on an original topology, a tunable bandpass filter is designed in the 60 GHz frequency range. The tunable behavior is achieved using capacitive MEMS shunt switches. The overall filter is designed on membrane substrate in order to keep down the losses and the dispersion
ISBN:9781424400874
1424400872
ISSN:2158-8473
DOI:10.1109/MELCON.2006.1653098