Investigation of sensitive and restoring parameters for nanostructured Al2O3 based humidity sensors

The volumetric-surface variant of the capacitive MDM (metal-dielectric-metal) structure of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements was designed. The improved humidity sensitivity, reduced response and...

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Bibliographic Details

Published in:	Proceedings of the 2014 IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference : 3-5 February 2014 pp. 72 - 74
Main Author:	Shimanovich, D. L.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01.02.2014
Subjects:	anodic porous alumina Chemicals Etching Humidity humidity sensing element membrane recovery time response time Sensitivity Sensors Time factors
ISBN:	9781479925933, 1479925934
Online Access:	Get full text
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