Investigation of sensitive and restoring parameters for nanostructured Al2O3 based humidity sensors

The volumetric-surface variant of the capacitive MDM (metal-dielectric-metal) structure of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements was designed. The improved humidity sensitivity, reduced response and...

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Vydáno v:Proceedings of the 2014 IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference : 3-5 February 2014 s. 72 - 74
Hlavní autor: Shimanovich, D. L.
Médium: Konferenční příspěvek
Jazyk:angličtina
Vydáno: IEEE 01.02.2014
Témata:
anodic porous alumina
Chemicals
Etching
Humidity
humidity sensing element
membrane
recovery time
response time
Sensitivity
Sensors
Time factors
ISBN:9781479925933, 1479925934
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Shrnutí:The volumetric-surface variant of the capacitive MDM (metal-dielectric-metal) structure of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements was designed. The improved humidity sensitivity, reduced response and recovery time over a wide humidity range were obtained due to preparing of alumina membranes with open-ended and widened pores without the barrier layer. Such technological approach allows to eliminate the effect of the electrolyte anions embedded in pore walls on the adsorption and desorption processes in humidity sensing elements.
ISBN:9781479925933
1479925934
DOI:10.1109/ElConRusNW.2014.6839205