Strategy-Oriented Exact Pattern Grouping Approaches for Integrated Circuit Designs

Exact layout pattern grouping has been utilized in recent years in integrated circuit design for manufacturability (DFM) applications. In this paper, we have developed several approaches of exact layout pattern grouping for different purposes. For achieving a small cluster count and largest repeatin...

Full description

Saved in:
Bibliographic Details
Published in:2022 International Workshop on Advanced Patterning Solutions (IWAPS) pp. 1 - 4
Main Authors: Gan, Yuan, Ding, Ming, Han, Chunying, Yan, Changlian, Jiang, Junhai, Zhang, Rongjia, Yu, Zongqiang
Format: Conference Proceeding
Language:English
Published: IEEE 21.10.2022
Subjects:
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Be the first to leave a comment!
You must be logged in first