Strategy-Oriented Exact Pattern Grouping Approaches for Integrated Circuit Designs
Exact layout pattern grouping has been utilized in recent years in integrated circuit design for manufacturability (DFM) applications. In this paper, we have developed several approaches of exact layout pattern grouping for different purposes. For achieving a small cluster count and largest repeatin...
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| Published in: | 2022 International Workshop on Advanced Patterning Solutions (IWAPS) pp. 1 - 4 |
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| Main Authors: | , , , , , , |
| Format: | Conference Proceeding |
| Language: | English |
| Published: |
IEEE
21.10.2022
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| Subjects: | |
| Online Access: | Get full text |
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