Polarity-switching top coats enable orientation of sub-10-nm block copolymer domains

Block copolymers (BCPs) must necessarily have high interaction parameters (χ), a fundamental measure of block incompatibility, to self-assemble into sub-10-nanometer features. Unfortunately, a high χ often results from blocks that have disparate interfacial energies, which makes the formation of use...

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Bibliographic Details

Published in:	Science (American Association for the Advancement of Science) Vol. 338; no. 6108; p. 775
Main Authors:	Bates, Christopher M, Seshimo, Takehiro, Maher, Michael J, Durand, William J, Cushen, Julia D, Dean, Leon M, Blachut, Gregory, Ellison, Christopher J, Willson, C Grant
Format:	Journal Article
Language:	English
Published:	United States 09.11.2012
ISSN:	1095-9203, 1095-9203
Online Access:	Get more information
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