Polarity-switching top coats enable orientation of sub-10-nm block copolymer domains

Block copolymers (BCPs) must necessarily have high interaction parameters (χ), a fundamental measure of block incompatibility, to self-assemble into sub-10-nanometer features. Unfortunately, a high χ often results from blocks that have disparate interfacial energies, which makes the formation of use...

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Bibliographic Details
Published in:Science (American Association for the Advancement of Science) Vol. 338; no. 6108; p. 775
Main Authors: Bates, Christopher M, Seshimo, Takehiro, Maher, Michael J, Durand, William J, Cushen, Julia D, Dean, Leon M, Blachut, Gregory, Ellison, Christopher J, Willson, C Grant
Format: Journal Article
Language:English
Published: United States 09.11.2012
ISSN:1095-9203, 1095-9203
Online Access:Get more information
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Summary:Block copolymers (BCPs) must necessarily have high interaction parameters (χ), a fundamental measure of block incompatibility, to self-assemble into sub-10-nanometer features. Unfortunately, a high χ often results from blocks that have disparate interfacial energies, which makes the formation of useful thin-film domain orientations challenging. To mitigate interfacial forces, polymers composed of maleic anhydride and two other components have been designed as top coats that can be spin-coated from basic aqueous solution in the ring-opened, acid salt form. When baked, the anhydride reforms and switches polarity to create a neutral layer enabling BCP feature alignment not possible by thermal annealing alone. Top coats were applied to the lamella-forming block copolymers poly(styrene-block-trimethylsilylstyrene-block-styrene) and poly(trimethylsilylstyrene-block-lactide), which were thermally annealed to produce perpendicular features with linewidths of 15 and 9 nanometers, respectively.
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ISSN:1095-9203
1095-9203
DOI:10.1126/science.1226046