Measurement and Control System for Atomic Force Microscope Based on Quartz Tuning Fork Self-Induction Probe

In this paper, we introduce a low-cost, expansible, and compatible measurement and control system for atomic force microscopes (AFM) based on a quartz tuning fork (QTF) self-sensing probe and frequency modulation, which is mainly composed of an embedded control system and a probe system. The embedde...

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Vydané v:Micromachines (Basel) Ročník 14; číslo 1; s. 227
Hlavní autori: Luo, Yongzhen, Ding, Xidong, Chen, Tianci, Su, Tao, Chen, Dihu
Médium: Journal Article
Jazyk:English
Vydavateľské údaje: Switzerland MDPI AG 15.01.2023
MDPI
Predmet:
Analog to digital converters
atomic force microscope
Atomic force microscopes
Automatic control
Automatic gain control
Channels
Circuit design
Computer peripherals
Computers
Control systems
Digital signal processing
Digital signal processors
Digital to analog converters
embedded control
Embedded systems
Error analysis
Field programmable gate arrays
Frequency measurement
Frequency modulation
Frequency synthesizers
Image quality
Lock in amplifiers
measurement and control system
Microprocessors
Microscopes
Microscopy
Q factors
Quartz
quartz tuning fork
Self excitation
self-inductive probe
Sensors
Software
Topography
Tungsten
Tuning
atomic force microscope
self-inductive probe
embedded control
frequency modulation
measurement and control system
quartz tuning fork
ISSN:2072-666X, 2072-666X
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Shrnutí:In this paper, we introduce a low-cost, expansible, and compatible measurement and control system for atomic force microscopes (AFM) based on a quartz tuning fork (QTF) self-sensing probe and frequency modulation, which is mainly composed of an embedded control system and a probe system. The embedded control system is based on a dual-core OMAPL138 microprocessor (DSP + ARM) equipped with 16 channels of a 16-bit high-precision general analog-to-digital converter (ADC) and a 16-bit high-precision general digital-to-analog converter (DAC), six channels of an analog-to-digital converter with a second-order anti-aliasing filter, four channels of a direct digital frequency synthesizer (DDS), a digital input and output (DIO) interface, and other peripherals. The uniqueness of the system hardware lies in the design of a high-precision and low-noise digital—analog hybrid lock-in amplifier (LIA), which is used to detect and track the frequency and phase of the QTF probe response signal. In terms of the system software, a software difference frequency detection method based on a digital signal processor (DSP) is implemented to detect the frequency change caused by the force gradient between the tip and the sample, and the relative error of frequency measurement is less than 3%. For the probe system, a self-sensing probe controller, including an automatic gain control (AGC) self-excitation circuit, is designed for a homemade balanced QTF self-sensing probe with a high quality factor (Q value) in an atmospheric environment. We measured the quality factor (Q value) of the balanced QTF self-sensing probes with different lengths of tungsten tips and successfully realized AFM topography imaging with a tungsten-tip QTF probe 3 mm in length. The results show that the QTF-based self-sensing probe and the developed AFM measurement and control system can obtain high quality surface topography scanning images in an atmospheric environment.
Bibliografia:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
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ISSN:2072-666X
2072-666X
DOI:10.3390/mi14010227