Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry

High aspect ratio (HAR) sample-induced aberrations seriously affect the topography measurement for the bottom of the microstructure by coherence scanning interferometry (CSI). Previous research proposed an aberration compensating method using deformable mirrors at the conjugate position of the pupil...

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Vydané v:	Sensors (Basel, Switzerland) Ročník 25; číslo 13; s. 4085
Hlavní autori:	Qiao, Wenyou, Gao, Zhishan, Yuan, Qun, Chen, Lu, Guo, Zhenyan, Huo, Xiao, Wang, Qian
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	Switzerland MDPI AG 30.06.2025 MDPI
Predmet:	aberration correction Algorithms Astigmatism coherence scanning interferometry Electric fields high aspect ratio Interferometry Light Mathematical optimization Measurement Optics Optimization Polynomials sample-induced aberrations Signal to noise ratio Simulation Topography virtual phase filter virtual phase filter sample-induced aberrations high aspect ratio coherence scanning interferometry aberration correction topography
ISSN:	1424-8220, 1424-8220
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