APA (7th ed.) Citation

Liu, S., Chen, X., & Zhang, C. (2015). Development of a broadband Mueller matrix ellipsometer as a powerful tool for nanostructure metrology. Thin solid films, 584, 176-185. https://doi.org/10.1016/j.tsf.2015.02.006

Chicago Style (17th ed.) Citation

Liu, Shiyuan, Xiuguo Chen, and Chuanwei Zhang. "Development of a Broadband Mueller Matrix Ellipsometer as a Powerful Tool for Nanostructure Metrology." Thin Solid Films 584 (2015): 176-185. https://doi.org/10.1016/j.tsf.2015.02.006.

MLA (9th ed.) Citation

Liu, Shiyuan, et al. "Development of a Broadband Mueller Matrix Ellipsometer as a Powerful Tool for Nanostructure Metrology." Thin Solid Films, vol. 584, 2015, pp. 176-185, https://doi.org/10.1016/j.tsf.2015.02.006.