5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate

In a free-standing 400-nm-thick platelet of crystalline ZY-LiNbO3, narrow electrodes (500 nm) placed periodically with a pitch of a few microns can eXcite standing shear-wave bulk acoustic resonances (XBARs), by utilising lateral electric fields oriented parallel to the crystalline Y-axis and parall...

Celý popis

Uloženo v:

Podrobná bibliografie
Vydáno v:	Electronics letters Ročník 55; číslo 2; s. 98 - 100
Hlavní autoři:	Plessky, V, Yandrapalli, S, Turner, P.J, Villanueva, L.G, Koskela, J, Hammond, R.B
Médium:	Journal Article
Jazyk:	angličtina
Vydáno:	The Institution of Engineering and Technology 24.01.2019
Témata:	4th generation mobile phones 5th generation mobile phones acoustic resonators bulk acoustic wave devices crystal resonators crystalline Y‐axis electrodes free‐standing platelet frequency 3.0 GHz to 6.0 GHz frequency 5.0 GHz high frequency filter lateral electric fields laterally‐excited bulk‐wave resonators LiNbO3 lithium compounds lithium niobate low‐loss filters MEMS process micromechanical devices microwave filters microwave resonators Microwave technology narrow electrodes optical photolithography photolithography piezoelectric coupling quality‐factors Q‐factor resonance frequency resonance Q‐factor resonance‐antiresonance frequency spacing RF filters shear‐wave bulk acoustic resonances size 400 nm size 500.0 nm wide band filters XBAR Q-factor 4th generation mobile phones MEMS process resonance frequency micromechanical devices size 500.0 nm lithium niobate quality-factors low-loss filters laterally-excited bulk-wave resonators high frequency filter 5th generation mobile phones bulk acoustic wave devices frequency 5.0 GHz crystal resonators crystalline Y-axis resonance-antiresonance frequency spacing electrodes microwave resonators free-standing platelet piezoelectric coupling size 400 nm acoustic resonators lateral electric fields LiNbO3 lithium compounds resonance Q-factor photolithography narrow electrodes XBAR frequency 3.0 GHz to 6.0 GHz wide band filters optical photolithography microwave filters shear-wave bulk acoustic resonances RF filters
ISSN:	0013-5194, 1350-911X, 1350-911X
On-line přístup:	Získat plný text
Tagy:	Přidat tag Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!

Popis
Shrnutí:	In a free-standing 400-nm-thick platelet of crystalline ZY-LiNbO3, narrow electrodes (500 nm) placed periodically with a pitch of a few microns can eXcite standing shear-wave bulk acoustic resonances (XBARs), by utilising lateral electric fields oriented parallel to the crystalline Y-axis and parallel to the plane of the platelet. The resonance frequency of ∼4800 MHz is determined mainly by the platelet thickness and only weakly depends on the electrode width and the pitch. Simulations show quality-factors (Q) at resonance and anti-resonance higher than 1000. Measurements of the first fabricated devices show a resonance Q-factor ∼300, strong piezoelectric coupling ∼25%, (indicated by the large Resonance-antiResonance frequency spacing, ∼11%) and an impedance at resonance of a few ohms. The static capacitance of the devices, corresponds to the imaginary part of the impedance ∼100 Ω. This device opens the possibility for the development of low-loss, wide band, RF filters in the 3–6 GHz range for 4th and 5th generation (4G/5G) mobile phones. XBARs can be produced using standard optical photolithography and MEMS processes. The 3rd, 5th, 7th, and 9th harmonics were observed, up to 38 GHz, and are also promising for high frequency filter design.
Bibliografie:	S. Yandrapalli: Also with EPFL, Lausanne, Switzerland
ISSN:	0013-5194 1350-911X 1350-911X
DOI:	10.1049/el.2018.7297