Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range

We have calculated inelastic mean free paths (IMFPs) for 41 elemental solids (Li, Be, graphite, diamond, glassy C, Na, Mg, Al, Si, K, Sc, Ti, V, Cr, Fe, Co, Ni, Cu, Ge, Y, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Cs, Gd, Tb, Dy, Hf, Ta, W, Re, Os, Ir, Pt, Au and Bi) for electron energies from 50 eV to 30 keV...

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Veröffentlicht in:Surface and interface analysis Jg. 43; H. 3; S. 689 - 713
Hauptverfasser: Tanuma, S., Powell, C. J., Penn, D. R.
Format: Journal Article
Sprache:Englisch
Veröffentlicht: Chichester, UK John Wiley & Sons, Ltd 01.03.2011
Wiley
Schlagworte:
AES
Algorithms
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Deviation
Electron and ion emission by liquids and solids; impact phenomena
Electron energy
Electronic conduction in metals and alloys
Electronic transport in condensed matter
Elemental solids
Energy use
Exact sciences and technology
Graphite
Inelastic mean free paths
Mathematical analysis
Mean free path
Palladium
Photoemission and photoelectron spectra
Physics
Relaxation times and mean free paths
XPS
Inelastic mean free paths
keV range
Electron scattering
Mean free path
Diamonds
Cesium
Iron
Osmium
AES
Elemental solids
eV range
Inelastic scattering
Graphite
Germanium
Nickel
Silicon
XPS
X-ray photoelectron spectra
ISSN:0142-2421, 1096-9918, 1096-9918
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Zusammenfassung:We have calculated inelastic mean free paths (IMFPs) for 41 elemental solids (Li, Be, graphite, diamond, glassy C, Na, Mg, Al, Si, K, Sc, Ti, V, Cr, Fe, Co, Ni, Cu, Ge, Y, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Cs, Gd, Tb, Dy, Hf, Ta, W, Re, Os, Ir, Pt, Au and Bi) for electron energies from 50 eV to 30 keV. The IMFPs were calculated from experimental optical data using the full Penn algorithm for energies up to 300 eV and the simpler single‐pole approximation for higher energies. The calculated IMFPs could be fitted to a modified form of the Bethe equation for inelastic scattering of electrons in matter for energies from 50 eV to 30 keV. The average root‐mean‐square (RMS) deviation in these fits was 0.48%. The new IMFPs were also compared with IMFPs from the predictive TPP‐2M equation; in these comparisons, the average RMS deviation was 12.3% for energies between 50 eV and 30 keV. This RMS deviation is almost the same as that found previously in a similar comparison for the 50 eV–2 keV range. Relatively large RMS deviations were found for diamond, graphite and cesium. If these three elements were excluded in the comparison, the average RMS deviation was 9.2% between 50 eV and 30 keV. We found satisfactory agreement of our calculated IMFPs with IMFPs from recent calculations and from elastic‐peak electron‐spectroscopy experiments. Copyright © 2010 John Wiley & Sons, Ltd.
Bibliographie:istex:033FF8B290894C43CE80B22276156E02D085215B
ark:/67375/WNG-6VQD1BKF-D
ArticleID:SIA3522
ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0142-2421
1096-9918
1096-9918
DOI:10.1002/sia.3522