Reduction of dislocation densities in single crystal CVD diamond by confinement in the lateral sector

The use of diamond as a semiconductor material in power electronics applications is held back by the presence of vertical threading dislocations that are believed to deteriorate device performance. Reducing their occurrence in single crystal diamond is therefore crucial. Recently we found that thick...

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Published in:Diamond and related materials Vol. 83; pp. 162 - 169
Main Authors: Boussadi, A., Tallaire, A., Kasu, M., Barjon, J., Achard, J.
Format: Journal Article
Language:English
Published: Amsterdam Elsevier B.V 01.03.2018
Elsevier BV
Elsevier
Subjects:
Chemical and Process Engineering
Chemical vapor deposition
Confinement
Crystals
Diamonds
Dislocation density
Engineering Sciences
Extended defect
Growth sector boundary
Physics
Plasma assisted CVD
Plasma physics
Pyramidal shape substrate
Reduction
Semiconductor materials
Single crystal diamond
Single crystals
Substrates
Threading dislocation
Threading dislocations
Confinement
Threading dislocation
Plasma assisted CVD
Growth sector boundary
Single crystal diamond
Extended defect
Pyramidal shape substrate
ISSN:0925-9635, 1879-0062
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Summary:The use of diamond as a semiconductor material in power electronics applications is held back by the presence of vertical threading dislocations that are believed to deteriorate device performance. Reducing their occurrence in single crystal diamond is therefore crucial. Recently we found that thick CVD diamond grown on the inclined plane of a pyramidal-shape substrate can lead to dislocation bending from a [001] to a [110] direction (Tallaire et al., 2013a [1]). In this work we further explore this strategy for the growth of thick crystals with low dislocation density. It is shown that the boundary angle between inclined lateral and top faces plays a critical role in preserving bent dislocations during the entire growth run. Indeed under well-chosen growth conditions, a boundary angle of at least 45° ensures that dislocations never intercept the top face and are confined in a lateral sector. We eventually show clear evidence of dislocation density reduction in the crystal using this approach. [Display omitted] •Growth of thick (100)-oriented single crystal CVD diamond with low dislocation density on (100) pyramidal shape substrate.•Evolution of pyramidal shape as function of boron and nitrogen impurities concentration in the gas phase and power/pressure values.•Evolution of growth sector boundary angle and control of direction propagation of dislocation.•Confinement of dislocations in lateral sectors during CVD diamond growth.
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ISSN:0925-9635
1879-0062
DOI:10.1016/j.diamond.2018.02.010