Research on Stability of Removal Function in Figuring Process of Mandrel of X-Ray-Focusing Mirror with Variable Curvature

Over the past 30 years, researchers have developed X-ray-focusing telescopes by employing the principle of total reflection in thin metal films. The Wolter-I focusing mirror with variable-curvature surfaces demands high precision. However, there has been limited investigation into the removal mechan...

Celý popis

Uložené v:
Podrobná bibliografia
Vydané v:Micromachines (Basel) Ročník 15; číslo 12; s. 1415
Hlavní autori: Xue, Jiadai, Li, Yuhao, Gao, Mingyang, Gu, Dongyun, Wu, Yanlin, Liu, Yanwen, Fan, Yuxin, Zheng, Peng, Chen, Wentao, Chen, Zhigao, Qiao, Zheng, Jin, Yuan, Ding, Fei, Wu, Yangong, Wang, Bo
Médium: Journal Article
Jazyk:English
Vydavateľské údaje: Switzerland MDPI AG 01.12.2024
Predmet:
Accuracy
Algorithms
compliant figuring process
Contact angle
Contact pressure
Curvature
Form accuracy
Hypotheses
Influence functions
Investigations
Mandrels
Manufacturing
Mathematical analysis
Metal films
Optical components
Optics
Polishing
Prediction models
Real time
real-time correction of TIFs
Residence time distribution
Surface properties
Surface roughness
Telescopes
the mid-spatial frequency error
Thin films
variable-curvature mandrel
X ray reflection
China
United Kingdom > UK
Italy
compliant figuring process
the mid-spatial frequency error
real-time correction of TIFs
variable-curvature mandrel
ISSN:2072-666X, 2072-666X
On-line prístup:Získať plný text
Tagy: Pridať tag
Žiadne tagy, Buďte prvý, kto otaguje tento záznam!
Popis
Shrnutí:Over the past 30 years, researchers have developed X-ray-focusing telescopes by employing the principle of total reflection in thin metal films. The Wolter-I focusing mirror with variable-curvature surfaces demands high precision. However, there has been limited investigation into the removal mechanisms for variable-curvature X-ray mandrels, which are crucial for achieving the desired surface roughness and form accuracy, especially in reducing mid-spatial frequency (MSF) errors. It is essential to incorporate flexible control in deterministic small-tool polishing to improve the tool’s adaptability to curvature variations and achieve stable, Gaussian-like tool influence functions (TIFs). In this paper, we introduce a curvature-adaptive prediction model for compliance figuring, based on the Preston hypothesis, using a compliant shaping tool with high slurry absorption and retention capabilities. This model predicts the compliance figuring process of variable-curvature symmetrical mandrels for X-ray grazing incidence mirrors by utilizing planar tool influence functions. Initially, a variable-curvature pressure model was developed to account for the parabolic and hyperbolic optical surfaces’ curvature characteristics. By introducing time-varying removal functions for material removal, the model establishes a variable-curvature factor function, which correlates actual downward pressure with parameters such as contact radius and contact angle, thus linking the variable-curvature surface with a planar reference. Subsequently, through analysis of the residence time distribution across different TIF models, hierarchical filtering, and PSD distribution, real-time correction of the TIFs was achieved to enable customized variable-curvature polishing. Furthermore, by applying a time-varying deconvolution algorithm, multiple rounds of flexible polishing iterations were conducted on the mandrels of a rotationally symmetric variable-curvature optical component, and the experimental results demonstrate a significant improvement in form accuracy, surface quality, and the optical performance of the mirror.
Bibliografia:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
content type line 23
ISSN:2072-666X
2072-666X
DOI:10.3390/mi15121415