Patterning of lithium lanthanum titanium oxide films by soft lithography as electrolyte for all-solid-state Li-ion batteries

The combination of sol–gel processing and soft-lithographic patterning presents a promising route towards three-dimensional (3D) micro Li-ion electrodes, and may offer a viable approach for the fabrication of all-solid-state 3D Li-ion batteries. The methods are relatively simple and therefore cheap...

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Bibliographic Details
Published in:Ceramics international Vol. 41; no. 10; pp. 13147 - 13152
Main Authors: Kokal, I., Göbel, O.F., van den Ham, E.J., ten Elshof, J.E., Notten, P.H.L, Hintzen, H.T.
Format: Journal Article
Language:English
Published: Elsevier Ltd 01.12.2015
Subjects:
Micro-molding
Soft lithography
Solid-state lithium-ion conductors
Sol–gel chemistry
Soft lithography
Micro-molding
Solid-state lithium-ion conductors
Sol–gel chemistry
ISSN:0272-8842, 1873-3956
Online Access:Get full text
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Summary:The combination of sol–gel processing and soft-lithographic patterning presents a promising route towards three-dimensional (3D) micro Li-ion electrodes, and may offer a viable approach for the fabrication of all-solid-state 3D Li-ion batteries. The methods are relatively simple and therefore cheap and moreover easy to scale up. In this paper, micro-patterned films of the Li-ion conducting perovskite-type phase with nominal composition Li0.29La0.57TiO3 (LLT) were prepared on silicon, using sol-gel synthesis in combination with micro-molding. After thermal annealing at 700°C, the phase formation, morphology, chemical composition and LLT film thickness were investigated by X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), Energy Dispersive Analysis of X-rays (EDAX) and Atomic Force Microscopy (AFM). The ionic conductivity of the LLT powder prepared during this study, determined by impedance spectroscopy, was 2.68·10−6S/cm at 25°C.
ISSN:0272-8842
1873-3956
DOI:10.1016/j.ceramint.2015.07.084