Double-actuator position-feedback mechanism for adjustable sensitivity in electrostatic-capacitive MEMS force sensors

[Display omitted] •Novel double-actuator position-feedback mechanism for MEMS force sensors.•Adjustable force sensitivity and measurement range independently from the desired working position.•Servo-assisted position-feedback loop ideally offers infinite input mechanical impedance.•The mechanism has...

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Vydané v:	Sensors and actuators. A. Physical. Ročník 312; s. 112127
Hlavní autori:	Nastro, Alessandro, Ferrari, Marco, Ferrari, Vittorio
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	Lausanne Elsevier B.V 01.09.2020 Elsevier BV
Predmet:	Actuator position Adjustable sensitivity Double-actuator position-feedback mechanism Electrostatic-capacitive MEMS Electrostatics Feedback control systems Feedback loops Force measurement Force sensor Mechanical impedance Microelectromechanical systems Position measurement Position sensing Reproducibility Sensors Stiffness Force sensor Electrostatic-capacitive MEMS Double-actuator position-feedback mechanism Adjustable sensitivity
ISSN:	0924-4247, 1873-3069
On-line prístup:	Získať plný text
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