Double-actuator position-feedback mechanism for adjustable sensitivity in electrostatic-capacitive MEMS force sensors

[Display omitted] •Novel double-actuator position-feedback mechanism for MEMS force sensors.•Adjustable force sensitivity and measurement range independently from the desired working position.•Servo-assisted position-feedback loop ideally offers infinite input mechanical impedance.•The mechanism has...

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Bibliographic Details
Published in:	Sensors and actuators. A. Physical. Vol. 312; p. 112127
Main Authors:	Nastro, Alessandro, Ferrari, Marco, Ferrari, Vittorio
Format:	Journal Article
Language:	English
Published:	Lausanne Elsevier B.V 01.09.2020 Elsevier BV
Subjects:	Actuator position Adjustable sensitivity Double-actuator position-feedback mechanism Electrostatic-capacitive MEMS Electrostatics Feedback control systems Feedback loops Force measurement Force sensor Mechanical impedance Microelectromechanical systems Position measurement Position sensing Reproducibility Sensors Stiffness Force sensor Electrostatic-capacitive MEMS Double-actuator position-feedback mechanism Adjustable sensitivity
ISSN:	0924-4247, 1873-3069
Online Access:	Get full text
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