Reaction paths of phosphine dissociation on silicon (001)

Using density functional theory and guided by extensive scanning tunneling microscopy (STM) image data, we formulate a detailed mechanism for the dissociation of phosphine (PH3) molecules on the Si(001) surface at room temperature. We distinguish between a main sequence of dissociation that involves...

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Bibliographic Details

Published in:	The Journal of chemical physics Vol. 144; no. 1; p. 014705
Main Authors:	Warschkow, O, Curson, N J, Schofield, S R, Marks, N A, Wilson, H F, Radny, M W, Smith, P V, Reusch, T C G, McKenzie, D R, Simmons, M Y
Format:	Journal Article
Language:	English
Published:	United States 07.01.2016
ISSN:	1089-7690
Online Access:	Get more information
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