On the grain size-thickness correlation for thin films

[Display omitted] A meta-analysis of published data in combination with measurements on Al, Cu, CuO, CoCrCuFeNi, Ni90Cr10, TiN, and V sputter deposited thin films, demonstrates that the grain size is correlated to the film thickness by a power law. The growth exponent depends on the homologous tempe...

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Bibliographic Details

Published in:	Acta materialia Vol. 212; p. 116896
Main Authors:	Dulmaa, Altangerel, Cougnon, Florian G., Dedoncker, Robin, Depla, Diederik
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 15.06.2021
Subjects:	grain size homologous temperature structure zone models structure zone models homologous temperature grain size
ISSN:	1359-6454, 1873-2453
Online Access:	Get full text
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