Using intelligent technology and real-time feedback algorithm to improve manufacturing process in IoT semiconductor industry

To enable the Internet of things, the semiconductor manufacturing process has progressed from the micron to the deep submicron level. Quality improvement is one of the great challenges in wafer fabrication. Computer-integrated manufacturing (CIM) has arisen as a means by which to reduce wafer rework...

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Vydáno v:	The Journal of supercomputing Ročník 77; číslo 5; s. 4639 - 4658
Hlavní autoři:	Li, Bin, Chen, Ruey-Shun, Liu, C.-Y.
Médium:	Journal Article
Jazyk:	angličtina
Vydáno:	New York Springer US 01.05.2021 Springer Nature B.V
Témata:	Algorithms Business competition Cluster analysis Clustering Compilers Computer integrated manufacturing Computer Science Data mining Data processing Deep Learning in IoT: Emerging Trends and Applications - 2019 Feedback control Flexibility Foundries Internet of Things Interpreters Manufacturing Process controls Process parameters Processor Architectures Production costs Programming Languages Real time Statistical process control Technology assessment Vector quantization Intelligent technology Real-time feedback algorithm Manufacturing process Internet of things (IoT) Semiconductor industry
ISSN:	0920-8542, 1573-0484
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