Thin film microstructure modelling through line-segment simulation

Ultra large scale integration (ULSI) technologies require uniform metallization layers over extreme topographies of submicron dimensions. On this scale, the fundamental properties of thin films and the processes during growth are increasingly important considerations. This paper introduces a new thi...

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Vydáno v:Thin solid films Ročník 266; číslo 1; s. 83 - 88
Hlavní autoři: Friedrich, L.J., Dew, S.K., Brett, M., Smy, T.
Médium: Journal Article
Jazyk:angličtina
Vydáno: Lausanne Elsevier B.V 15.09.1995
Elsevier Science
Témata:
Aluminium
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physical vapour deposition
Physics
Structure and morphology; thickness
Surface diffusion
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Wetting
Aluminium
Surface diffusion
Physical vapour deposition
Wetting
Thin films
Wettability
Simulation
Physical vapor deposition
Theoretical study
Contact angle
Microstructure
Modeling
ISSN:0040-6090, 1879-2731
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Popis
Shrnutí:Ultra large scale integration (ULSI) technologies require uniform metallization layers over extreme topographies of submicron dimensions. On this scale, the fundamental properties of thin films and the processes during growth are increasingly important considerations. This paper introduces a new thin film growth model called grofilms (grain orientated film microstructure simulator). By using a line segment algorithm and by the incorporation of interfacial and surface energy calculations, Grofilms can depict both the surface and microstructure of a film deposited over ULSI topography. Grofilms is capable of simulating many of the fundamental processes involved with thin film growth, such as nucleation, substrate wetting, grain boundary grooving, columnar growth and crystal facetting. This paper will describe the model and demonstrate the ability of Grofilms to simulate film growth and produce microstructural and surface information about the film.
Bibliografie:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(95)06672-1