Effect of sputtering pressure on structure and dielectric properties of bismuth magnesium niobate thin films prepared by RF magnetron sputtering

The cubic pyrochlore Bi1.5MgNb1.5O7 (BMN) thin films were deposited on Pt coated sapphire substrates by rf magnetron sputtering using different pressures. The effects of sputtering pressure on phase structure and dielectric properties of BMN thin films were investigated. The X-ray diffraction result...

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Veröffentlicht in:	Thin solid films Jg. 603; S. 391 - 394
Hauptverfasser:	Gao, Libin, Jiang, Shuwen, Li, Ruguan
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	Elsevier B.V 31.03.2016
Schlagworte:	Bi1.5MgNb1.5O7 thin films Cubic pyrochlore films Low loss tangent Sputtering pressure Tunability Cubic pyrochlore films Bi1.5MgNb1.5O7 thin films Low loss tangent Sputtering pressure Tunability
ISSN:	0040-6090, 1879-2731
Online-Zugang:	Volltext
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