Elastic characterization of Au thin films utilizing laser induced acoustic Rayleigh waves

Wide frequency-band Rayleigh waves (~100 MHz) were utilized to characterize the elastic constants of thin Au/Cr films deposited on glass substrates. The Rayleigh waves were excited utilizing laser induced thermoelastic mechanism and detected using a knife-edge technique apparatus. The dispersion of...

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Vydáno v:Journal of physics. Conference series Ročník 278; číslo 1; s. 012005 - 4
Hlavní autoři: Haim, A, Bar-Ad, S, Azoulay, A
Médium: Journal Article
Jazyk:angličtina
Vydáno: Bristol IOP Publishing 01.01.2011
Témata:
Algorithms
Chromium
Elastic properties
Film thickness
Fittings
Glass
Glass substrates
Gold coatings
Knife-edge
Lasers
Modulus of elasticity
Physics
Rayleigh waves
Thickness measurement
Thickness measurements
Thin films
ISSN:1742-6596, 1742-6588, 1742-6596
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Shrnutí:Wide frequency-band Rayleigh waves (~100 MHz) were utilized to characterize the elastic constants of thin Au/Cr films deposited on glass substrates. The Rayleigh waves were excited utilizing laser induced thermoelastic mechanism and detected using a knife-edge technique apparatus. The dispersion of the signals in glass substrates coated with Au/Cr was measured and fitted to theory using a non-linear regression algorithm. From the fitting, the Au films Young modulus and the film thickness were extracted. The results were analyzed with regards to AFM scans performed on the samples and independent thickness measurement done by a dektak3 profiler. Results show a good agreement between the two measurements.
Bibliografie:ObjectType-Article-1
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ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/278/1/012005