Small-Scale Deposition of Thin Films and Nanoparticles by Microevaporation Sources

This paper reports on a novel miniaturized deposition technique based on micro-hotplates which are used as microevaporation sources (MES) for a localized deposition of thin films and nanoparticles. The feasibility of this small-scale deposition technique and its general properties are shown for depo...

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Vydáno v:	Journal of microelectromechanical systems Ročník 20; číslo 1; s. 21 - 27
Hlavní autoři:	Meyer, R, Hamann, S, Ehmann, M, König, Dennis, Thienhaus, S, Savan, A, Ludwig, A
Médium:	Journal Article
Jazyk:	angličtina
Vydáno:	New York, NY IEEE 01.02.2011 Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Témata:	Biomembranes Cross-disciplinary physics: materials science; rheology Deposition Electron microscopy Exact sciences and technology Feasibility Film condensation Fluid dynamics Fundamental areas of phenomenology (including applications) Heating Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials science Mechanical instruments, equipment and techniques Methods of deposition of films and coatings; film growth and epitaxy microelectromechanical devices Microelectromechanical systems Micromechanical devices and systems Nanoparticles Nanoscale materials and structures: fabrication and characterization Physics Rarefied gas dynamics Silicon Silver Substrates Temperature measurement Thin films microelectromechanical devices Knudsen flow Sample size Vapor condensation Experimental study Electron microscopy Deposition process Thin films Nanoparticles Silver Transmission electron microscopy Knudsen number Heating elements Microelectromechanical device
ISSN:	1057-7157, 1941-0158
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Popis
Shrnutí:	This paper reports on a novel miniaturized deposition technique based on micro-hotplates which are used as microevaporation sources (MES) for a localized deposition of thin films and nanoparticles. The feasibility of this small-scale deposition technique and its general properties are shown for depositions of Ag on unpatterned and microstructured substrates. The deposited films are rotationally symmetric and show a distinct lateral thickness change. We take advantage of this latter effect, as, e.g., all stages of film condensation can be observed within one experiment on one sample, in a size suitable for transmission electron microscopy investigations. For realizing the most laterally confined depositions, a micro-Knudsen cell was used. It is shown that the use of MES is also very suitable for the fabrication and deposition of nanoparticles.
Bibliografie:	ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 content type line 23
ISSN:	1057-7157 1941-0158
DOI:	10.1109/JMEMS.2010.2090506