In Situ Metallic Coating of Atom Probe Specimen for Enhanced Yield, Performance, and Increased Field-of-View

Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpene...

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Vydané v:	Microscopy and microanalysis Ročník 30; číslo 6; s. 1109
Hlavní autori:	Schwarz, Tim M, Woods, Eric, Singh, Mahander P, Chen, Xinren, Jung, Chanwon, Aota, Leonardo S, Jang, Kyuseon, Krämer, Mathias, Kim, Se-Ho, McCarroll, Ingrid, Gault, Baptiste
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	England 03.02.2025
Predmet:	coating field of view mass resolution yield atom probe tomography
ISSN:	1435-8115, 1435-8115
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