In Situ Metallic Coating of Atom Probe Specimen for Enhanced Yield, Performance, and Increased Field-of-View

Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpene...

Full description

Bibliographic Details

Published in:	Microscopy and microanalysis Vol. 30; no. 6; p. 1109
Main Authors:	Schwarz, Tim M, Woods, Eric, Singh, Mahander P, Chen, Xinren, Jung, Chanwon, Aota, Leonardo S, Jang, Kyuseon, Krämer, Mathias, Kim, Se-Ho, McCarroll, Ingrid, Gault, Baptiste
Format:	Journal Article
Language:	English
Published:	England 03.02.2025
Subjects:	coating field of view mass resolution yield atom probe tomography
ISSN:	1435-8115, 1435-8115
Online Access:	Get more information
Tags:	Add Tag No Tags, Be the first to tag this record!