Influence of chemisorption on the double hysteresis phenomenon during reactive sputtering

Process curves that are obtained during reactive magnetron sputtering can exhibit a double S-shape, also termed a double hysteresis. A previous study mainly focused on the relationship between the double shape behavior and the reaction kinetics of implanted reactive ions, although chemisorption also...

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Bibliographic Details

Published in:	Applied surface science Vol. 613; p. 155901
Main Authors:	Van Bever, Josja, Strijckmans, Koen, Depla, Diederik
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 15.03.2023
Subjects:	Modeling Reactive sputtering Target poisoning Target poisoning Modeling Reactive sputtering
ISSN:	0169-4332
Online Access:	Get full text
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