Influence of chemisorption on the double hysteresis phenomenon during reactive sputtering

Process curves that are obtained during reactive magnetron sputtering can exhibit a double S-shape, also termed a double hysteresis. A previous study mainly focused on the relationship between the double shape behavior and the reaction kinetics of implanted reactive ions, although chemisorption also...

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Bibliographic Details
Published in:Applied surface science Vol. 613; p. 155901
Main Authors: Van Bever, Josja, Strijckmans, Koen, Depla, Diederik
Format: Journal Article
Language:English
Published: Elsevier B.V 15.03.2023
Subjects:
Modeling
Reactive sputtering
Target poisoning
Target poisoning
Modeling
Reactive sputtering
ISSN:0169-4332
Online Access:Get full text
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Summary:Process curves that are obtained during reactive magnetron sputtering can exhibit a double S-shape, also termed a double hysteresis. A previous study mainly focused on the relationship between the double shape behavior and the reaction kinetics of implanted reactive ions, although chemisorption also defines the target condition. As a follow-up study, the influence of chemisorption on double hysteresis is computationally studied by high-throughput calculations using a state-of-the-art model for reactive sputtering. The analysis reveals that the magnitude of the double hysteresis is a conserved quantity for the chemisorption driven reactions at the substrate level. At the target level, a balance between compound formation by direct reactive ion implantation and chemisorption is established. A minimal condition for double hysteresis is derived and process conditions are identified for which the double hysteresis can be measured for target materials prone to strong chemisorption of the reactive gas. The condition can assist to further explore the close interplay between chemisorption and implantation during reactive sputtering. [Display omitted] •Quantification of the double hysteresis phenomenon by high throughput modeling.•A description of the impact of reactive gas chemisorption on the double hysteresis.•Derivation of the minimal requirements to observe double hysteresis.
ISSN:0169-4332
DOI:10.1016/j.apsusc.2022.155901