Influence of chemisorption on the double hysteresis phenomenon during reactive sputtering

Process curves that are obtained during reactive magnetron sputtering can exhibit a double S-shape, also termed a double hysteresis. A previous study mainly focused on the relationship between the double shape behavior and the reaction kinetics of implanted reactive ions, although chemisorption also...

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Vydáno v:Applied surface science Ročník 613; s. 155901
Hlavní autoři: Van Bever, Josja, Strijckmans, Koen, Depla, Diederik
Médium: Journal Article
Jazyk:angličtina
Vydáno: Elsevier B.V 15.03.2023
Témata:
Modeling
Reactive sputtering
Target poisoning
Target poisoning
Modeling
Reactive sputtering
ISSN:0169-4332
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Shrnutí:Process curves that are obtained during reactive magnetron sputtering can exhibit a double S-shape, also termed a double hysteresis. A previous study mainly focused on the relationship between the double shape behavior and the reaction kinetics of implanted reactive ions, although chemisorption also defines the target condition. As a follow-up study, the influence of chemisorption on double hysteresis is computationally studied by high-throughput calculations using a state-of-the-art model for reactive sputtering. The analysis reveals that the magnitude of the double hysteresis is a conserved quantity for the chemisorption driven reactions at the substrate level. At the target level, a balance between compound formation by direct reactive ion implantation and chemisorption is established. A minimal condition for double hysteresis is derived and process conditions are identified for which the double hysteresis can be measured for target materials prone to strong chemisorption of the reactive gas. The condition can assist to further explore the close interplay between chemisorption and implantation during reactive sputtering. [Display omitted] •Quantification of the double hysteresis phenomenon by high throughput modeling.•A description of the impact of reactive gas chemisorption on the double hysteresis.•Derivation of the minimal requirements to observe double hysteresis.
ISSN:0169-4332
DOI:10.1016/j.apsusc.2022.155901