A flexible phase error compensation method based on probability distribution functions in phase measuring profilometry

•Probability distribution function (PDF) is used to analyze wrapped phase.•Systematic nonlinearity can be quantified by PDF curve.•Coefficients for compensation can be found by minimizing PDF.•Coefficients can be got even from the on-situ measurement. We demonstrate a fast and easy phase-error compe...

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Veröffentlicht in:Optics and laser technology Jg. 129; S. 106267
Hauptverfasser: Liu, Yuankun, Yu, Xin, Xue, Junpeng, Zhang, Qican, Su, Xianyu
Format: Journal Article
Sprache:Englisch
Veröffentlicht: Kidlington Elsevier Ltd 01.09.2020
Elsevier BV
Schlagworte:
Algorithms
Computer simulation
Distribution functions
Error analysis
Error compensation
Fringe analysis
Gamma
Iterative methods
Phase error
Probability distribution
Probability distribution function
Probability distribution functions
Statistical analysis
Three-dimensional sensing
Probability distribution function
Gamma
Phase error
Fringe analysis
Three-dimensional sensing
ISSN:0030-3992, 1879-2545
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Zusammenfassung:•Probability distribution function (PDF) is used to analyze wrapped phase.•Systematic nonlinearity can be quantified by PDF curve.•Coefficients for compensation can be found by minimizing PDF.•Coefficients can be got even from the on-situ measurement. We demonstrate a fast and easy phase-error compensation technique based on statistical analysis of the wrapped phase distributions. The probability distribution functions (PDF) of the wrapped phase will become abnormal when there are nonlinear effects in a phase measuring profilometry. With the known iterative phase compensation algorithm, the most appropriate coefficients will be obtained by smoothing the PDF. The proposed method doesn’t need more fringe images than the choosing three or four step fringe images as well as reference images. It can lead to a fast and easy phase-error compensation. Both computer simulation and experiment are carried out to demonstrate the validity of this technique.
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ISSN:0030-3992
1879-2545
DOI:10.1016/j.optlastec.2020.106267