Mechanisms, models and methods of vapor deposition

The condensation and assembly of atomic fluxes incident upon the surface of a thin film during its growth by vapor deposition is complex. Mediating the growth process by varying the flux, adjusting the film temperature, irradiating the growth surface with energetic (assisting) particles or making se...

Full description

Saved in:

Bibliographic Details
Published in:	Progress in materials science Vol. 46; no. 3; pp. 329 - 377
Main Authors:	Wadley, H.N.G, Zhou, X, Johnson, R.A, Neurock, M
Format:	Journal Article
Language:	English
Published:	New York, NY Elsevier Ltd 2001 Elsevier
Subjects:	Applied sciences Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Metals. Metallurgy Methods of deposition of films and coatings; film growth and epitaxy Physics Theory and models of film growth Ion beam Embedding Giant magnetoresistance Crystal growth from vapors Surface structure Thin films Multilayers Vapor deposition Monte Carlo methods Multiscale method Transition elements Molecular dynamics calculations Growth mechanism Density functional method Magnetic materials Modelling Ab initio calculations Electron density Diffusion Transition element alloys
ISSN:	0079-6425, 1873-2208
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!

Abstract	The condensation and assembly of atomic fluxes incident upon the surface of a thin film during its growth by vapor deposition is complex. Mediating the growth process by varying the flux, adjusting the film temperature, irradiating the growth surface with energetic (assisting) particles or making selective use of surfactants is essential to achieve the level of atomic scale perfection needed for high performance films. A multiscale modeling method for analyzing the growth of vapor deposited thin films and nanoparticles has begun to emerge and is reviewed. Ab-initio methods such as density functional theory are used to provide key insights about the basic mechanisms of atomic assembly. Recent work has explored the transition paths and kinetics of atomic hopping on defective surfaces and is investigating the role of surfactants to control surface atom mobility. New forms of interatomic potentials based upon the embedded atom method, Tersoff and bond order potentials can now be combined with molecular dynamics to investigate many aspects of vapor phase synthesis processes. For example, the energy distribution of atoms emitted from sputtering targets, the effects of hot atom impacts upon the mechanisms of surface diffusion, and the role of assisting ions in controlling surface roughness can all be investigated by this approach. They also enable the many activation barriers present during atomic assembly to be efficiently evaluated and used as inputs in multipath kinetic Monte Carlo models or continuum models of film growth. This hierarchy of modeling techniques now allows many of the atomic assembly mechanisms to be incorporated in film growth simulations of increasing fidelity. We identify new opportunities, to extend this modeling approach to the growth of increasingly complicated material systems. Using the growth of metal multilayers that exhibit giant magnetoresistance as a case study, we show that the approach can also lead to the identification of novel growth processes that utilize adatom energy control, very low energy ion assistance, or highly mobile, low solubility chemical species (surfactants) to control surface diffusion controlled film growth. Such approaches appear capable of enabling the creation of multilayered materials with exceptionally smooth, unmixed interfaces, with significantly superior magnetoresistance.
AbstractList	The condensation and assembly of atomic fluxes incident upon the surface of a thin film during its growth by vapor deposition is complex. Mediating the growth process by varying the flux, adjusting the film temperature, irradiating the growth surface with energetic (assisting) particles or making selective use of surfactants is essential to achieve the level of atomic scale perfection needed for high performance films. A multiscale modeling method for analyzing the growth of vapor deposited thin films and nanoparticles has begun to emerge and is reviewed. Ab-initio methods such as density functional theory are used to provide key insights about the basic mechanisms of atomic assembly. Recent work has explored the transition paths and kinetics of atomic hopping on defective surfaces and is investigating the role of surfactants to control surface atom mobility. New forms of interatomic potentials based upon the embedded atom method, Tersoff and bond order potentials can now be combined with molecular dynamics to investigate many aspects of vapor phase synthesis processes. For example, the energy distribution of atoms emitted from sputtering targets, the effects of hot atom impacts upon the mechanisms of surface diffusion, and the role of assisting ions in controlling surface roughness can all be investigated by this approach. They also enable the many activation barriers present during atomic assembly to be efficiently evaluated and used as inputs in multipath kinetic Monte Carlo models or continuum models of film growth. This hierarchy of modeling techniques now allows many of the atomic assembly mechanisms to be incorporated in film growth simulations of increasing fidelity. We identify new opportunities, to extend this modeling approach to the growth of increasingly complicated material systems. Using the growth of metal multilayers that exhibit giant magnetoresistance as a case study, we show that the approach can also lead to the identification of novel growth processes that utilize adatom energy control, very low energy ion assistance, or highly mobile, low solubility chemical species (surfactants) to control surface diffusion controlled film growth. Such approaches appear capable of enabling the creation of multilayered materials with exceptionally smooth, unmixed interfaces, with significantly superior magnetoresistance.
Author	Neurock, M Zhou, X Johnson, R.A Wadley, H.N.G
Author_xml	– sequence: 1 givenname: H.N.G surname: Wadley fullname: Wadley, H.N.G email: haydn@virginia.edu organization: School of Engineering and Applied Science, Department of Materials Science, University of Virginia, Thornton Hall, Charlottesville, VA 22903-2442, USA – sequence: 2 givenname: X surname: Zhou fullname: Zhou, X organization: School of Engineering and Applied Science, Department of Materials Science, University of Virginia, Thornton Hall, Charlottesville, VA 22903-2442, USA – sequence: 3 givenname: R.A surname: Johnson fullname: Johnson, R.A organization: School of Engineering and Applied Science, Department of Materials Science, University of Virginia, Thornton Hall, Charlottesville, VA 22903-2442, USA – sequence: 4 givenname: M surname: Neurock fullname: Neurock, M organization: School of Engineering and Applied Science, Department of Chemical Engineering, University of Virginia, Charlottesville, VA 22903-2442 USA
BackLink	http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=925218$$DView record in Pascal Francis
BookMark	eNqFkE1LAzEQhoNUsK3-BGHBi4Krk-xXggeR4hdUPKjnkE0mNLK7KclS8N-720oPXjqXuTzPy8w7I5POd0jIOYUbCrS8_QCoRFrmrLgEuIJhRMqPyJTyKksZAz4h0z1yQmYxfg9MRUFMCXtDvVKdi228TlpvsImJ6kzSYr_yJibeJhu19iExuPbR9c53p-TYqibi2d-ek6-nx8_FS7p8f35dPCxTnWVFn9amQoolCDRoFRfcFgUO15iysoYp1JXleZ1zKC1lDLUQkOu8qLmtmWEUszm52OWuVdSqsUF12kW5Dq5V4UcKVjDKB6rYUTr4GAPaPUBBjvXIbT1y_F0CyG09cvTu_nna9Wr8rw_KNQft-5099IUbh0FG7bDTaFxA3Uvj3YGEXzmZgKM
CODEN	PRMSAQ
CitedBy_id	crossref_primary_10_1088_2053_1591_ad26a7 crossref_primary_10_1016_j_mtcomm_2025_113495 crossref_primary_10_1116_1_4929664 crossref_primary_10_1039_C5CP02929E crossref_primary_10_1016_j_surfcoat_2007_04_019 crossref_primary_10_1016_j_matchemphys_2013_10_029 crossref_primary_10_3390_nano13111717 crossref_primary_10_1063_1_4869444 crossref_primary_10_1007_s44210_025_00055_5 crossref_primary_10_1088_1674_1056_26_12_126802 crossref_primary_10_1016_j_vacuum_2003_08_013 crossref_primary_10_1016_j_commatsci_2008_03_020 crossref_primary_10_1063_5_0234984 crossref_primary_10_1109_LMAG_2018_2890367 crossref_primary_10_1016_S1359_6454_01_00287_7 crossref_primary_10_1016_j_physb_2019_411838 crossref_primary_10_1016_j_physa_2015_10_056 crossref_primary_10_1088_1361_648X_aae508 crossref_primary_10_3390_chemosensors13050183 crossref_primary_10_1016_j_ces_2017_09_018 crossref_primary_10_3389_fphy_2018_00059 crossref_primary_10_1007_s12598_010_0057_8 crossref_primary_10_1002_adma_202409071 crossref_primary_10_1016_j_xcrp_2025_102542 crossref_primary_10_1016_S0927_0256_02_00164_7 crossref_primary_10_1016_j_cossms_2004_03_009 crossref_primary_10_1016_j_apsusc_2010_06_033 crossref_primary_10_1088_1674_1056_19_11_113604 crossref_primary_10_3390_biomimetics9100588 crossref_primary_10_1016_j_physb_2009_02_014 crossref_primary_10_1140_epjb_e2012_30269_9 crossref_primary_10_1016_j_actamat_2020_02_011 crossref_primary_10_1016_j_jcrysgro_2019_125366 crossref_primary_10_1063_1_2816227 crossref_primary_10_1016_j_pmatsci_2015_06_003 crossref_primary_10_1016_j_spmi_2018_03_008 crossref_primary_10_1134_S1995080224603825 crossref_primary_10_1002_pssa_202200288 crossref_primary_10_1088_0953_8984_25_47_472202 crossref_primary_10_1007_s00339_012_7061_9 crossref_primary_10_1088_1674_1056_18_5_021 crossref_primary_10_1016_j_cplett_2011_11_068 crossref_primary_10_1016_j_mtla_2021_101043 crossref_primary_10_1002_apj_5500120406 crossref_primary_10_1088_0953_8984_25_10_105404 crossref_primary_10_1016_j_ijthermalsci_2015_02_017 crossref_primary_10_1360_03yw0069 crossref_primary_10_1016_j_physleta_2017_07_014 crossref_primary_10_3390_ma12081355 crossref_primary_10_1063_1_4804954 crossref_primary_10_1016_j_tsf_2006_10_001 crossref_primary_10_1016_j_physleta_2008_09_043 crossref_primary_10_1021_acsnano_5c05689 crossref_primary_10_1080_08927022_2012_762095 crossref_primary_10_1088_0953_8984_22_37_375503 crossref_primary_10_1016_j_susc_2015_03_025 crossref_primary_10_1007_s00339_010_6044_y crossref_primary_10_1063_5_0023081 crossref_primary_10_1016_j_intermet_2019_106553 crossref_primary_10_1016_j_matdes_2017_04_076 crossref_primary_10_1016_j_surfcoat_2017_11_022 crossref_primary_10_1063_1_2927389 crossref_primary_10_1016_j_mssp_2005_05_001 crossref_primary_10_1007_s10570_025_06587_8 crossref_primary_10_1016_j_pcrysgrow_2008_09_001 crossref_primary_10_1039_B706149H crossref_primary_10_1016_j_ijpharm_2025_125879 crossref_primary_10_1016_j_physb_2017_12_025 crossref_primary_10_1016_j_electacta_2017_02_103 crossref_primary_10_1088_1367_2630_aaf117 crossref_primary_10_1016_j_matchemphys_2008_10_031 crossref_primary_10_1016_j_matlet_2018_08_070 crossref_primary_10_1016_j_cma_2008_03_010 crossref_primary_10_1016_j_mssp_2006_02_001 crossref_primary_10_1016_S1875_5372_11_60011_8 crossref_primary_10_1063_1_2176107 crossref_primary_10_1021_acsnano_4c09346 crossref_primary_10_1002_pssb_201248193 crossref_primary_10_1016_j_mtcomm_2021_102833 crossref_primary_10_1063_1_2007849 crossref_primary_10_1063_1_1968444 crossref_primary_10_1063_1_2007848 crossref_primary_10_1016_j_commatsci_2004_02_023 crossref_primary_10_1063_1_4954687 crossref_primary_10_1088_2053_1583_ad63b6 crossref_primary_10_1149_1_2400603 crossref_primary_10_1016_j_physb_2021_413436 crossref_primary_10_1016_j_cpc_2021_108132 crossref_primary_10_1016_j_matchemphys_2011_09_045 crossref_primary_10_4028_www_scientific_net_AMR_452_453_1429 crossref_primary_10_1007_s10934_008_9261_4 crossref_primary_10_1016_j_jallcom_2021_159282 crossref_primary_10_1088_1674_1056_ab7188 crossref_primary_10_1016_j_vacuum_2008_03_078 crossref_primary_10_1016_j_commatsci_2017_10_034 crossref_primary_10_1002_pssb_202300282 crossref_primary_10_1016_j_pmatsci_2022_101052 crossref_primary_10_1002_adma_202418705 crossref_primary_10_1088_1674_1056_acb48f crossref_primary_10_1016_j_intermet_2012_05_018 crossref_primary_10_1016_j_surfcoat_2024_130666 crossref_primary_10_1016_j_surfcoat_2003_09_040 crossref_primary_10_1088_0953_8984_28_50_505201 crossref_primary_10_1021_acsphotonics_5c00881 crossref_primary_10_1179_1432891714Z_000000000583 crossref_primary_10_1016_j_apsusc_2015_11_090 crossref_primary_10_1063_1_4932521 crossref_primary_10_1063_1_5085313 crossref_primary_10_1007_BF02838531 crossref_primary_10_1140_epjd_s10053_023_00592_x crossref_primary_10_1016_j_physrep_2007_09_004 crossref_primary_10_1186_s11671_017_2096_7 crossref_primary_10_3390_coatings15070762 crossref_primary_10_1016_j_commatsci_2018_02_020 crossref_primary_10_1007_s10853_024_09433_7 crossref_primary_10_4028_www_scientific_net_AMR_926_930_132 crossref_primary_10_1016_j_jmmm_2019_165492 crossref_primary_10_4028_www_scientific_net_SSP_203_204_142 crossref_primary_10_1063_1_5129015 crossref_primary_10_1016_j_addma_2024_104096 crossref_primary_10_1016_j_cap_2010_12_012 crossref_primary_10_1016_j_tsf_2017_09_006 crossref_primary_10_1088_1361_651X_aca4ec crossref_primary_10_1016_j_msea_2004_09_015 crossref_primary_10_1116_1_1827627 crossref_primary_10_1088_1361_6668_aafa88 crossref_primary_10_1007_s11661_008_9503_8 crossref_primary_10_1016_j_jallcom_2016_06_281 crossref_primary_10_1016_j_commatsci_2012_04_035 crossref_primary_10_1557_mrs2009_247 crossref_primary_10_1016_j_compscitech_2012_01_004 crossref_primary_10_1016_j_optlastec_2020_106505 crossref_primary_10_1088_1674_1056_abf10a crossref_primary_10_1016_j_commatsci_2021_110581 crossref_primary_10_1007_s11106_018_9958_0 crossref_primary_10_1080_10643389_2019_1705103 crossref_primary_10_1515_aot_2017_0079 crossref_primary_10_1016_j_commatsci_2011_06_007 crossref_primary_10_1007_s11433_013_5219_x crossref_primary_10_1016_j_jcrysgro_2019_02_048 crossref_primary_10_1088_0022_3727_47_22_224004 crossref_primary_10_7234_kscm_2011_24_3_017 crossref_primary_10_1088_1674_1056_21_5_053401 crossref_primary_10_1038_s41467_024_48110_w crossref_primary_10_1007_s00707_015_1430_3 crossref_primary_10_1002_celc_202400154 crossref_primary_10_1088_0256_307X_26_3_036104 crossref_primary_10_4028_www_scientific_net_AMM_152_154_183 crossref_primary_10_3390_mi13060845 crossref_primary_10_4028_www_scientific_net_SSP_203_204_160 crossref_primary_10_1016_j_jmst_2022_11_008 crossref_primary_10_1088_0953_8984_18_13_003 crossref_primary_10_1063_1_5085455 crossref_primary_10_1016_j_apt_2010_10_013 crossref_primary_10_1016_j_commatsci_2022_111503 crossref_primary_10_1016_j_jmmm_2021_168841 crossref_primary_10_1007_s11663_015_0385_z crossref_primary_10_1016_j_commatsci_2025_114034 crossref_primary_10_1080_14786430310001623579 crossref_primary_10_1016_j_apsusc_2014_07_130 crossref_primary_10_1051_matecconf_201816703011 crossref_primary_10_1088_1674_1056_aba2e5 crossref_primary_10_1016_j_commatsci_2010_11_030 crossref_primary_10_4028_www_scientific_net_AMR_583_326
Cites_doi	10.1557/PROC-538-323 10.1103/PhysRevLett.76.4428 10.1149/1.2221213 10.1103/PhysRevLett.81.2735 10.1080/01418619808221223 10.1016/S0039-6028(99)00336-2 10.1016/0039-6028(92)91440-M 10.1103/PhysRevB.51.2427 10.1007/BF01538341 10.1103/PhysRevB.39.7441 10.1063/1.108648 10.1109/20.179614 10.1016/S1359-6454(97)00156-0 10.1063/1.368297 10.1103/PhysRev.140.A1133 10.1016/S0039-6028(96)01554-3 10.1016/0039-6028(96)00609-7 10.1557/PROC-441-541 10.1557/PROC-389-95 10.1103/PhysRevB.9.5008 10.1103/PhysRev.136.B864 10.1016/0039-6028(95)01042-4 10.1016/0039-6028(95)00150-6 10.1007/BF01312585 10.1016/S1359-6454(98)00403-0 10.1103/PhysRevB.56.10579 10.1016/S0039-6028(99)00335-0 10.1103/PhysRevLett.71.895 10.1006/jcph.1995.1153 10.1103/PhysRevLett.55.2471 10.1126/science.284.5421.1819 10.1016/0039-6028(91)90604-Q 10.1016/0031-8914(61)90093-3 10.1142/S0218625X97000213 10.1103/PhysRevB.59.8500 10.1126/science.277.5330.1237 10.1063/1.373568 10.1016/0039-6028(93)90093-Y 10.1103/PhysRevLett.61.2472 10.1016/S0039-6028(96)01573-7 10.1109/20.333913 10.1103/PhysRevLett.72.3843 10.1063/1.359565 10.1063/1.1703035 10.1016/S0375-9601(97)00960-2 10.1016/S1359-6454(96)00283-2 10.1016/0039-6028(95)01023-8 10.1103/PhysRevB.39.5792 10.1103/PhysRevB.52.6006 10.1103/PhysRevB.29.2963 10.1016/S0022-0248(98)00685-X 10.1063/1.104765 10.1103/PhysRevB.39.12554 10.1103/PhysRevB.41.6240 10.1103/PhysRev.184.383 10.1109/20.477564 10.1126/science.285.5428.703 10.1016/S0168-583X(96)00681-7 10.1103/PhysRevB.32.7685 10.1016/0025-5416(87)90101-7 10.1103/PhysRevB.42.7311 10.1126/science.285.5428.692 10.1016/0039-6028(95)00401-7 10.1007/978-3-642-48375-2 10.1103/PhysRevB.41.7892 10.1103/PhysRevB.47.10142 10.1063/1.882695 10.1007/BF01538208 10.1557/PROC-538-529 10.1103/PhysRevB.59.8487 10.1103/PhysRevLett.68.3335 10.1007/BF00614759 10.1080/01418618408244210 10.1103/PhysRevB.35.2169 10.1016/0304-8853(93)90643-G 10.1103/PhysRevB.29.6443 10.1016/0039-6028(96)00712-1 10.1016/0168-583X(95)80155-F 10.1016/0168-583X(92)95829-G 10.1063/1.365620 10.1103/PhysRevLett.73.2448 10.1103/PhysRevLett.80.2877 10.1103/PhysRevB.57.10054 10.1063/1.1729057 10.1103/PhysRevB.55.R16061 10.1038/18185 10.1049/el:19981278 10.1557/PROC-528-221 10.1103/PhysRevB.51.14790 10.1016/S1359-6454(96)00256-X 10.1103/PhysRevLett.71.2437 10.1103/PhysRevLett.81.850 10.1103/PhysRevB.44.4747
ContentType	Journal Article
Copyright	2001 2001 INIST-CNRS
Copyright_xml	– notice: 2001 – notice: 2001 INIST-CNRS
DBID	AAYXX CITATION IQODW
DOI	10.1016/S0079-6425(00)00009-8
DatabaseName	CrossRef Pascal-Francis
DatabaseTitle	CrossRef
DatabaseTitleList
DeliveryMethod	fulltext_linktorsrc
Discipline	Engineering Physics Applied Sciences
EISSN	1873-2208
EndPage	377
ExternalDocumentID	925218 10_1016_S0079_6425_00_00009_8 S0079642500000098
GroupedDBID	--K --M -~X .~1 0R~ 0SF 123 1B1 1~. 1~5 29P 4.4 457 4G. 5VS 7-5 71M 8P~ 9JN AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXUO AAYJJ ABFNM ABJNI ABMAC ABXDB ABXRA ABYKQ ACDAQ ACGFS ACIWK ACNNM ACRLP ADBBV ADEZE ADMUD AEBSH AEKER AENEX AEZYN AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BKOJK BLXMC CS3 DU5 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q GBLVA HVGLF HZ~ IHE J1W KOM M24 M41 MAGPM MO0 N9A NCXOZ O-L O9- OAUVE OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SDF SDG SDP SES SEW SMS SPC SPCBC SPD SSM SSZ T5K T9H WH7 WUQ XPP ZE2 ZMT ~02 ~G- 9DU AATTM AAXKI AAYWO AAYXX ABWVN ACLOT ACRPL ACVFH ADCNI ADNMO ADVLN AEIPS AEUPX AFJKZ AFPUW AGQPQ AIGII AIIUN AKBMS AKRWK AKYEP ANKPU APXCP CITATION EFKBS ~HD AFXIZ AGCQF AGRNS BNPGV IQODW SSH
ID	FETCH-LOGICAL-c335t-bd7e1e609edefa898f55e220d67fd2aec7f84b4806f122ec9904c45b8fb2d21e3
ISICitedReferencesCount	236
ISICitedReferencesURI	http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=000167751900010&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D
ISSN	0079-6425
IngestDate	Mon Jul 21 09:14:28 EDT 2025 Tue Nov 18 22:13:43 EST 2025 Sat Nov 29 05:57:48 EST 2025 Fri Feb 23 02:29:23 EST 2024
IsPeerReviewed	true
IsScholarly	true
Issue	3
Keywords	Ion beam Embedding Giant magnetoresistance Crystal growth from vapors Surface structure Thin films Multilayers Vapor deposition Monte Carlo methods Multiscale method Transition elements Molecular dynamics calculations Growth mechanism Density functional method Magnetic materials Modelling Ab initio calculations Electron density Diffusion Transition element alloys
Language	English
License	https://www.elsevier.com/tdm/userlicense/1.0 CC BY 4.0
LinkModel	OpenURL
MergedId	FETCHMERGED-LOGICAL-c335t-bd7e1e609edefa898f55e220d67fd2aec7f84b4806f122ec9904c45b8fb2d21e3
PageCount	49
ParticipantIDs	pascalfrancis_primary_925218 crossref_primary_10_1016_S0079_6425_00_00009_8 crossref_citationtrail_10_1016_S0079_6425_00_00009_8 elsevier_sciencedirect_doi_10_1016_S0079_6425_00_00009_8
PublicationCentury	2000
PublicationDate	2001 2001-1-00
PublicationDateYYYYMMDD	2001-01-01
PublicationDate_xml	– year: 2001 text: 2001
PublicationDecade	2000
PublicationPlace	New York, NY
PublicationPlace_xml	– name: New York, NY
PublicationTitle	Progress in materials science
PublicationYear	2001
Publisher	Elsevier Ltd Elsevier
Publisher_xml	– name: Elsevier Ltd – name: Elsevier
References	Betz, Husinsky (BIB84) 1995; B102 Michely, Land, Littmark, Cosma (BIB107) 1992; 272 Michley, Esch, Comsa (BIB113) 1996; 349 Pettifor, Oleinik (BIB34) 1999; 59 (BIB9) 1996 Hansen LB, Hammer B, Norskov JK. Denmark Technical University, Lynby, Denmark, 1998. Park, Ha, Park, Lee (BIB110) 1997; 380 Shah, Torres, Tscharner, Wyrsch, Keppner (BIB5) 1999; 285 Orszag S, Goldhirsch I. Private communication, 1999. Robinson, Torrens (BIB80) 1974; 9 Finnis, Sinclair (BIB27) 1984; 50 Liu, Cohen, Adams, Voter (BIB47) 1991; 253 Nohlen, Wandelt (BIB108) 1995; 331 Hofer (BIB90) 1991 Kelly III BM. Private communication, 1998. Meyer, Vrijmoeth, van der Vegt, Blieg, Behm (BIB105) 1995; 51 Perdew, Chevay, Vosko, Jackson, Pdeson, Singh, Fiolhais (BIB23) 1992; 71 Maboudian, Postawa, El-Maazawi, Garrison, Winograd (BIB87) 1990; B42 Yata, Rouch, Nakamura (BIB96) 1997; 56 Daw (BIB28) 1989; 39 (BIB1) 1994 Schmidt, Wolter, Wandelt (BIB112) 1996; 349 Wadley HNG, Barker W, Gilmer G, editors. Mechanisms, models and methods of vapor deposition. Mat Res Soc Symp Proc, vol. 616, 2000. Zhou, Wadley (BIB40) 1999; 431 Kohn, Sham (BIB19) 1965; 140 Meyer, van der begt, Vrijmoeth, Vlieg, Behm (BIB106) 1996; 355 Zhou, Wadley (BIB39) 1999; 431 Parkin S. IBM. Almaden, Private communication. van der Vegt, Huisman, Howes, Vlieg (BIB115) 1995; 330 Tolkes, David, Zeppenfeld, Comsa (BIB93) 1998; 80 Zhou, Johnson, Wadley (BIB50) 1997; 45 Zhou, Wadley (BIB51) 1999; 47 Yang YG, Zhou XW, Wadley HNG. Hyperthermal kinetic Monte Carlo modeling of thin film growth. Surface Science, submitted for publication. Olson (BIB15) 1997; 277 Pan, Towe (BIB8) 1998; 34 Egelhoff WF. GMR Modeling Workshop, Charlottesville, VA, 2–4 December 1996. Mrovec, Vitek, Nguyen-Manh, Pettifor, Wang, Sob (BIB37) 1999; 538 Adalsteinsson, Sethian (BIB53) 1995; 120 Lewowski, Wieczorek (BIB103) 1997; 4 Biersack, Eckstein (BIB78) 1984; 34 Honda, Ohmoto, Imada, Nawate (BIB68) 1993; 126 Desa, Ghosal, Kosut, Ebert, Kozak, Abrahamson, Groves, Zhou, Wadley (BIB57) 1999; 17 Kohn W. Nobel Laureate in Chemistry for development of the density-functional theory, 1998. Coronell, Jensen (BIB60) 1992; 8 Groves, Wadley (BIB54) 1997; 441 Jing, Qiu, Zhao, Cao (BIB102) 1998; 239 Zhou W, Ratnaparkhi P, Wadley NHG. Acta Mater, in preparation. Gades, Urbassek (BIB83) 1995; A61 Zhou, Johnson, Wadley (BIB43) 1997; 45 Winters, Coufal, Eckstein (BIB73) 1989; 41 Zhou XW, Wadley NHG. J Appl Phys, 2000;87(12):8487. Battaile, Srolovitz, Butler (BIB49) 1998; 194 Camarero, Spendeler, Schmidt, Heinz, de Miguel, Miranda (BIB97) 1994; 73 Yang, Johnson, Wadley (BIB46) 1997; 45 Rose, Smith, Guinea, Ferrante (BIB30) 1984; 29 Fairbanks, Hecht (BIB6) 1987; 88 Smith (BIB33) 1992; 67 (BIB2) 1993 Oppo, Scheffler (BIB109) 1993; 71 Southern, Willis, Robinson (BIB72) 1963; 34 Steinruck, Pesty, Zhang, Madey (BIB95) 1995; 51 Takizawa, Terakura (BIB32) 1989; 39 Zhou, Johnson, Wadley (BIB89) 1997; 45 Rosenfeld, Servaty, Teichert, Poelsema, Comsa (BIB111) 1993; 71 Vrijmoeth, van der Vegt, Meyer, Vlieg, Behm (BIB117) 1994; 72 Horch, Lorensen, Helveg, Laegsgaard, Stensgaard, Jacosen, Norskov, Bessenbacher (BIB119) 1999; 398 Daughton, Granley (BIB3) 1999; 5 Foiles (BIB85) 1985; 32 Car, Parrinello (BIB20) 1985; 55 Terakura, Oguchi, Mohri, Watanabe (BIB31) 1987; 35 Anderson (BIB82) 1987; B18 SIA. The national technology roadmap for semiconductors. Semiconductor Industry Association, 1997. Wolter, Schmidt, Wandelt (BIB118) 1993; 298 Diode RF, Zou W. Sputter deposition of copper. Master thesis, 1999. Parkin, Li, Smith (BIB66) 1991; 58 Fiorentini, Oppo, Scheffler (BIB101) 1995; 60 Vanderbilt (BIB24) 1990; 41 Awschalom, Kikkawa (BIB12) 1999; 6 Hohenberg, Kohn (BIB18) 1964; 136 Johnson (BIB29) 1989; 39 Baibich (BIB62) 1988; 61 Oleinik, Pettifor (BIB36) 1999; 59 Zhou, Wadley (BIB41) 1998; 84 Rusponi, Costantini, Boragno, Valbusa (BIB71) 1998; 81 Pettifor (BIB35) 1995 Zhu T. Private communication, 1996. Cale (BIB55) 1995; 389 Wolter, Ammer, Wandelt, Neddermeyer (BIB94) 1997; 377 Eckstein (BIB77) 1991 Kools (BIB91) 1995; 77 Hartig, Kushner (BIB59) 1993; 62 Rosencrance SW, Burnham JS, Sanders DE, He C, Garrison BJ, Winograd N, Postawa Z, Depristo AE. Phys Rev B 1995;52:6006. Daw, Baskes (BIB26) 1984; 29 Jiang, Zhao, Cao (BIB104) 1998; 57 van der Vegt, van Pinxteren, Lohmeier, Vlieg, Thornton (BIB114) 1992; 68 Sigmund (BIB76) 1969; 184 Johnson RE. Energetic charged-particle interactions with atmospheres and surfaces. In: Lanzerotti, LJ, Hill M, Stoffler D, editors. Physics and chemistry in space planetology, vol. 19. Berlin: Springer-Verlag, 1990. p. 68. Camarero, de Miguel, Miranda, Kuch, Zharnikov, Dittschar, Schneider, Kirschner (BIB98) 1996; 76 Camarero, Ferron, Cros, Gomez, Vazquez de Parga, Gallego, Prieto, de Miguel, Miranda (BIB99) 1998; 81 Weijsenfeld, Hoogendoorn, Koedam (BIB74) 1961; 27 Wadley, Zou, Zhou, Groves, Desa, Kosut, Abrahamson, Ghosal, Kozak, Wang (BIB58) 1999; 538 Ohno, Esfarjani, Kawazoe (BIB14) 1999 van der Vegt, Huisman, Howes, Turner, Vlieg (BIB116) 1996; 365 Parker, Coffey, Howard, Tsang, Fontana, Hylton (BIB7) 1996; 32 Cheney, Pitkin (BIB70) 1965; 36 Urbassek (BIB81) 1997; B122 Egelhoff, Kief (BIB69) 1992; 28 Anthony, Brug, Zhang (BIB67) 1994; 30 Coufal, Winters, Bang, Eckstein (BIB75) 1991; 44 Groves JF. PhD dissertation, University of Virginia, 1998. Voter, Germann (BIB44) 1998; 528 Vosko, Wilk, Nassair (BIB22) 1980; 58 Eckstein, Biersack (BIB79) 1986; B63 Egelhoff, Chen, Powell, Stiles, McMichael, Judy, Takano, Berkowitz (BIB92) 1997; 8 Painter O, Lee RK, Schere A, Yariv A, O'Brien JD, Dapkus, PD, Kim I. Science 1999;284:1819. Laasonen, Pasquarello, Car, Lee, Vanderbilt (BIB21) 1993; 47 DiSalvo (BIB11) 1999; 285 Crugel, Ababou, Solal, Jezequel, Natoli, Belkhou (BIB100) 1997; 55 Girshick, Bratkovsky, Pettifor, Vitek (BIB38) 1998; 77 Steinruck (10.1016/S0079-6425(00)00009-8_BIB95) 1995; 51 Betz (10.1016/S0079-6425(00)00009-8_BIB84) 1995; B102 Eckstein (10.1016/S0079-6425(00)00009-8_BIB79) 1986; B63 Coronell (10.1016/S0079-6425(00)00009-8_BIB60) 1992; 8 Robinson (10.1016/S0079-6425(00)00009-8_BIB80) 1974; 9 10.1016/S0079-6425(00)00009-8_BIB25 Cheney (10.1016/S0079-6425(00)00009-8_BIB70) 1965; 36 Rusponi (10.1016/S0079-6425(00)00009-8_BIB71) 1998; 81 van der Vegt (10.1016/S0079-6425(00)00009-8_BIB114) 1992; 68 Rose (10.1016/S0079-6425(00)00009-8_BIB30) 1984; 29 Parkin (10.1016/S0079-6425(00)00009-8_BIB66) 1991; 58 DiSalvo (10.1016/S0079-6425(00)00009-8_BIB11) 1999; 285 Awschalom (10.1016/S0079-6425(00)00009-8_BIB12) 1999; 6 Perdew (10.1016/S0079-6425(00)00009-8_BIB23) 1992; 71 Meyer (10.1016/S0079-6425(00)00009-8_BIB105) 1995; 51 Pan (10.1016/S0079-6425(00)00009-8_BIB8) 1998; 34 Baibich (10.1016/S0079-6425(00)00009-8_BIB62) 1988; 61 Gades (10.1016/S0079-6425(00)00009-8_BIB83) 1995; A61 Oleinik (10.1016/S0079-6425(00)00009-8_BIB36) 1999; 59 Parker (10.1016/S0079-6425(00)00009-8_BIB7) 1996; 32 Vosko (10.1016/S0079-6425(00)00009-8_BIB22) 1980; 58 Mrovec (10.1016/S0079-6425(00)00009-8_BIB37) 1999; 538 Michley (10.1016/S0079-6425(00)00009-8_BIB113) 1996; 349 Yata (10.1016/S0079-6425(00)00009-8_BIB96) 1997; 56 (10.1016/S0079-6425(00)00009-8_BIB1) 1994 Liu (10.1016/S0079-6425(00)00009-8_BIB47) 1991; 253 Camarero (10.1016/S0079-6425(00)00009-8_BIB97) 1994; 73 Ohno (10.1016/S0079-6425(00)00009-8_BIB14) 1999 10.1016/S0079-6425(00)00009-8_BIB42 10.1016/S0079-6425(00)00009-8_BIB45 Biersack (10.1016/S0079-6425(00)00009-8_BIB78) 1984; 34 Smith (10.1016/S0079-6425(00)00009-8_BIB33) 1992; 67 Fairbanks (10.1016/S0079-6425(00)00009-8_BIB6) 1987; 88 10.1016/S0079-6425(00)00009-8_BIB48 Michely (10.1016/S0079-6425(00)00009-8_BIB107) 1992; 272 Winters (10.1016/S0079-6425(00)00009-8_BIB73) 1989; 41 Vrijmoeth (10.1016/S0079-6425(00)00009-8_BIB117) 1994; 72 Horch (10.1016/S0079-6425(00)00009-8_BIB119) 1999; 398 Pettifor (10.1016/S0079-6425(00)00009-8_BIB35) 1995 Zhou (10.1016/S0079-6425(00)00009-8_BIB41) 1998; 84 Kohn (10.1016/S0079-6425(00)00009-8_BIB19) 1965; 140 Battaile (10.1016/S0079-6425(00)00009-8_BIB49) 1998; 194 Voter (10.1016/S0079-6425(00)00009-8_BIB44) 1998; 528 10.1016/S0079-6425(00)00009-8_BIB56 Daughton (10.1016/S0079-6425(00)00009-8_BIB3) 1999; 5 Finnis (10.1016/S0079-6425(00)00009-8_BIB27) 1984; 50 Wolter (10.1016/S0079-6425(00)00009-8_BIB94) 1997; 377 Hartig (10.1016/S0079-6425(00)00009-8_BIB59) 1993; 62 Wolter (10.1016/S0079-6425(00)00009-8_BIB118) 1993; 298 Weijsenfeld (10.1016/S0079-6425(00)00009-8_BIB74) 1961; 27 10.1016/S0079-6425(00)00009-8_BIB52 Fiorentini (10.1016/S0079-6425(00)00009-8_BIB101) 1995; 60 Camarero (10.1016/S0079-6425(00)00009-8_BIB98) 1996; 76 Urbassek (10.1016/S0079-6425(00)00009-8_BIB81) 1997; B122 Shah (10.1016/S0079-6425(00)00009-8_BIB5) 1999; 285 Hohenberg (10.1016/S0079-6425(00)00009-8_BIB18) 1964; 136 Pettifor (10.1016/S0079-6425(00)00009-8_BIB34) 1999; 59 Anthony (10.1016/S0079-6425(00)00009-8_BIB67) 1994; 30 Nohlen (10.1016/S0079-6425(00)00009-8_BIB108) 1995; 331 10.1016/S0079-6425(00)00009-8_BIB65 10.1016/S0079-6425(00)00009-8_BIB64 (10.1016/S0079-6425(00)00009-8_BIB2) 1993 10.1016/S0079-6425(00)00009-8_BIB4 Zhou (10.1016/S0079-6425(00)00009-8_BIB89) 1997; 45 Hofer (10.1016/S0079-6425(00)00009-8_BIB90) 1991 Zhou (10.1016/S0079-6425(00)00009-8_BIB51) 1999; 47 Desa (10.1016/S0079-6425(00)00009-8_BIB57) 1999; 17 10.1016/S0079-6425(00)00009-8_BIB61 10.1016/S0079-6425(00)00009-8_BIB63 Schmidt (10.1016/S0079-6425(00)00009-8_BIB112) 1996; 349 Egelhoff (10.1016/S0079-6425(00)00009-8_BIB69) 1992; 28 Eckstein (10.1016/S0079-6425(00)00009-8_BIB77) 1991 Tolkes (10.1016/S0079-6425(00)00009-8_BIB93) 1998; 80 Adalsteinsson (10.1016/S0079-6425(00)00009-8_BIB53) 1995; 120 Zhou (10.1016/S0079-6425(00)00009-8_BIB39) 1999; 431 Daw (10.1016/S0079-6425(00)00009-8_BIB28) 1989; 39 Takizawa (10.1016/S0079-6425(00)00009-8_BIB32) 1989; 39 Zhou (10.1016/S0079-6425(00)00009-8_BIB43) 1997; 45 van der Vegt (10.1016/S0079-6425(00)00009-8_BIB115) 1995; 330 Egelhoff (10.1016/S0079-6425(00)00009-8_BIB92) 1997; 8 Terakura (10.1016/S0079-6425(00)00009-8_BIB31) 1987; 35 Wadley (10.1016/S0079-6425(00)00009-8_BIB58) 1999; 538 Zhou (10.1016/S0079-6425(00)00009-8_BIB40) 1999; 431 Cale (10.1016/S0079-6425(00)00009-8_BIB55) 1995; 389 Yang (10.1016/S0079-6425(00)00009-8_BIB46) 1997; 45 Oppo (10.1016/S0079-6425(00)00009-8_BIB109) 1993; 71 Groves (10.1016/S0079-6425(00)00009-8_BIB54) 1997; 441 Honda (10.1016/S0079-6425(00)00009-8_BIB68) 1993; 126 Rosenfeld (10.1016/S0079-6425(00)00009-8_BIB111) 1993; 71 Zhou (10.1016/S0079-6425(00)00009-8_BIB50) 1997; 45 Kools (10.1016/S0079-6425(00)00009-8_BIB91) 1995; 77 Olson (10.1016/S0079-6425(00)00009-8_BIB15) 1997; 277 10.1016/S0079-6425(00)00009-8_BIB86 10.1016/S0079-6425(00)00009-8_BIB88 Anderson (10.1016/S0079-6425(00)00009-8_BIB82) 1987; B18 Vanderbilt (10.1016/S0079-6425(00)00009-8_BIB24) 1990; 41 Jing (10.1016/S0079-6425(00)00009-8_BIB102) 1998; 239 Southern (10.1016/S0079-6425(00)00009-8_BIB72) 1963; 34 Jiang (10.1016/S0079-6425(00)00009-8_BIB104) 1998; 57 Car (10.1016/S0079-6425(00)00009-8_BIB20) 1985; 55 Camarero (10.1016/S0079-6425(00)00009-8_BIB99) 1998; 81 Laasonen (10.1016/S0079-6425(00)00009-8_BIB21) 1993; 47 Girshick (10.1016/S0079-6425(00)00009-8_BIB38) 1998; 77 Daw (10.1016/S0079-6425(00)00009-8_BIB26) 1984; 29 Maboudian (10.1016/S0079-6425(00)00009-8_BIB87) 1990; B42 10.1016/S0079-6425(00)00009-8_BIB17 Johnson (10.1016/S0079-6425(00)00009-8_BIB29) 1989; 39 Crugel (10.1016/S0079-6425(00)00009-8_BIB100) 1997; 55 Lewowski (10.1016/S0079-6425(00)00009-8_BIB103) 1997; 4 10.1016/S0079-6425(00)00009-8_BIB10 van der Vegt (10.1016/S0079-6425(00)00009-8_BIB116) 1996; 365 (10.1016/S0079-6425(00)00009-8_BIB9) 1996 10.1016/S0079-6425(00)00009-8_BIB13 10.1016/S0079-6425(00)00009-8_BIB16 Foiles (10.1016/S0079-6425(00)00009-8_BIB85) 1985; 32 Park (10.1016/S0079-6425(00)00009-8_BIB110) 1997; 380 Sigmund (10.1016/S0079-6425(00)00009-8_BIB76) 1969; 184 Coufal (10.1016/S0079-6425(00)00009-8_BIB75) 1991; 44 Meyer (10.1016/S0079-6425(00)00009-8_BIB106) 1996; 355
References_xml	– volume: 55 start-page: r16061 year: 1997 ident: BIB100 publication-title: Phys. Rev. B – volume: 34 start-page: 1883 year: 1998 ident: BIB8 publication-title: Electron Lett. – year: 1999 ident: BIB14 article-title: computational materials science (from ab-initio to Monte Carlo methods) – volume: 285 start-page: 692 year: 1999 ident: BIB5 publication-title: Science – reference: Hansen LB, Hammer B, Norskov JK. Denmark Technical University, Lynby, Denmark, 1998. – volume: 27 start-page: 763 year: 1961 ident: BIB74 publication-title: Physica – volume: 441 start-page: 541 year: 1997 ident: BIB54 publication-title: Materials Research Society Proceedings – reference: Groves JF. PhD dissertation, University of Virginia, 1998. – volume: 431 start-page: 58 year: 1999 ident: BIB40 publication-title: Surf. Sci. – volume: 57 start-page: 10054 year: 1998 ident: BIB104 publication-title: Phys. Rev. B – year: 1995 ident: BIB35 article-title: Bonding and structure of molecules and solids – reference: Painter O, Lee RK, Schere A, Yariv A, O'Brien JD, Dapkus, PD, Kim I. Science 1999;284:1819. – volume: 32 start-page: 142 year: 1996 ident: BIB7 publication-title: IEEE Transactions on Magnetics – volume: 35 start-page: 2169 year: 1987 ident: BIB31 publication-title: Phys. Rev. B. – volume: B102 start-page: 281 year: 1995 ident: BIB84 publication-title: Nucl. Instr. Meth – volume: 349 start-page: L89 year: 1996 ident: BIB112 publication-title: Surf. Sci. – volume: 29 start-page: 2963 year: 1984 ident: BIB30 publication-title: Phys. Rev. B. – volume: 77 start-page: 2993 year: 1995 ident: BIB91 publication-title: J. Appl. Phys. – volume: 331 start-page: 902 year: 1995 ident: BIB108 publication-title: Surf. Sci. – volume: 39 start-page: 12554 year: 1989 ident: BIB29 publication-title: Phys. Rev. B. – reference: Diode RF, Zou W. Sputter deposition of copper. Master thesis, 1999. – volume: 17 start-page: 1926 year: 1999 ident: BIB57 publication-title: JVST A – volume: 365 start-page: 205 year: 1996 ident: BIB116 publication-title: Surf. Sci. – volume: 45 start-page: 1513 year: 1997 ident: BIB89 publication-title: Acta Mater – volume: 285 start-page: 703 year: 1999 ident: BIB11 publication-title: Science – reference: Zhou XW, Wadley NHG. J Appl Phys, 2000;87(12):8487. – volume: 389 start-page: 95 year: 1995 ident: BIB55 publication-title: Materials Research Society Proceedings – volume: 41 start-page: 7892 year: 1990 ident: BIB24 publication-title: Phys. Rev. B – reference: Zhou W, Ratnaparkhi P, Wadley NHG. Acta Mater, in preparation. – reference: Wadley HNG, Barker W, Gilmer G, editors. Mechanisms, models and methods of vapor deposition. Mat Res Soc Symp Proc, vol. 616, 2000. – volume: 126 start-page: 419 year: 1993 ident: BIB68 publication-title: J. Magnetism and Magnetic Materials – volume: 72 start-page: 3843 year: 1994 ident: BIB117 publication-title: Phys. Rev. Lett. – reference: Parkin S. IBM. Almaden, Private communication. – volume: 4 start-page: 219 year: 1997 ident: BIB103 publication-title: Surf. Rev. Lett. – volume: 28 start-page: 2742 year: 1992 ident: BIB69 publication-title: IEEE Transaction on Magnetics – year: 1996 ident: BIB9 publication-title: Coatings for high-temperature structural materials: trends and opportunities – year: 1994 ident: BIB1 publication-title: Handbook of deposition technologies for films and coatings: science technology and applications – volume: 253 start-page: 334 year: 1991 ident: BIB47 publication-title: Surf. Sci. – volume: 377 start-page: 983 year: 1997 ident: BIB94 publication-title: Surf. Sci. – year: 1993 ident: BIB2 publication-title: Nanophases and nanocrystalline structures – volume: 51 start-page: 14790 year: 1995 ident: BIB105 publication-title: Phys. Rev. B – volume: 41 start-page: 6240 year: 1989 ident: BIB73 publication-title: Phys. Rev. B. – volume: 398 start-page: 134 year: 1999 ident: BIB119 publication-title: Nature – volume: 60 start-page: 399 year: 1995 ident: BIB101 publication-title: Appl. Phys. A – reference: Egelhoff WF. GMR Modeling Workshop, Charlottesville, VA, 2–4 December 1996. – volume: 77 start-page: 981 year: 1998 ident: BIB38 publication-title: Phil. Mag. A – reference: Orszag S, Goldhirsch I. Private communication, 1999. – volume: 5 start-page: 22 year: 1999 ident: BIB3 publication-title: The Industrial Physicist – volume: 34 start-page: 153 year: 1963 ident: BIB72 publication-title: J. Appl. Phys – reference: Kelly III BM. Private communication, 1998. – volume: 330 start-page: 101 year: 1995 ident: BIB115 publication-title: Surf. Sci. – volume: 59 start-page: 8500 year: 1999 ident: BIB34 publication-title: Phys. Rev. B. – volume: B122 start-page: 427 year: 1997 ident: BIB81 publication-title: Nucl. Instr. Meth. Phys. Res. – volume: 6 start-page: 33 year: 1999 ident: BIB12 publication-title: Physics Today – volume: 71 start-page: 895 year: 1993 ident: BIB111 publication-title: Phys. Rev. Lett. – volume: 36 start-page: 3542 year: 1965 ident: BIB70 publication-title: J. Appl. Phys – volume: 538 start-page: 323 year: 1999 ident: BIB58 publication-title: Proc. MRS – volume: 62 start-page: 1594 year: 1993 ident: BIB59 publication-title: Appl. Phys. Lett. – reference: SIA. The national technology roadmap for semiconductors. Semiconductor Industry Association, 1997. – volume: 45 start-page: 4441 year: 1997 ident: BIB43 publication-title: Acta Metall. Mater. – volume: 29 start-page: 6443 year: 1984 ident: BIB26 publication-title: Phys. Rev. B – volume: 538 start-page: 529 year: 1999 ident: BIB37 publication-title: Materials Research Society Proceedings – volume: 47 start-page: 1063 year: 1999 ident: BIB51 publication-title: Acta Mater. – volume: 8 start-page: 2264 year: 1992 ident: BIB60 publication-title: J. Electrochem – volume: 81 start-page: 2735 year: 1998 ident: BIB71 publication-title: Phys. Rev. Lett. – volume: 8 start-page: 6142 year: 1997 ident: BIB92 publication-title: J. Appl. Phys – volume: 71 start-page: 2437 year: 1993 ident: BIB109 publication-title: Phys. Rev. Lett. – reference: Johnson RE. Energetic charged-particle interactions with atmospheres and surfaces. In: Lanzerotti, LJ, Hill M, Stoffler D, editors. Physics and chemistry in space planetology, vol. 19. Berlin: Springer-Verlag, 1990. p. 68. – volume: 73 start-page: 2448 year: 1994 ident: BIB97 publication-title: Phys. Rev. Lett. – volume: 88 start-page: 321 year: 1987 ident: BIB6 publication-title: Materials Science and Engineering – volume: 67 start-page: 335 year: 1992 ident: BIB33 publication-title: Nucl. Inst. Meth. Phys. Rev. B – volume: 298 start-page: 173 year: 1993 ident: BIB118 publication-title: Surf. Sci. – volume: 32 start-page: 7685 year: 1985 ident: BIB85 publication-title: Phys. Rev. B. – volume: 528 start-page: 221 year: 1998 ident: BIB44 publication-title: Materials Research Society Proceedings – volume: 56 start-page: 10579 year: 1997 ident: BIB96 publication-title: Phys. Rev B – volume: 349 start-page: L89 year: 1996 ident: BIB113 publication-title: Surf. Sci. – volume: 55 start-page: 2471 year: 1985 ident: BIB20 publication-title: Phys. Rev. Lett. – volume: 58 start-page: 1200 year: 1980 ident: BIB22 publication-title: Can. J. Phys. Chem. – volume: B63 start-page: 109 year: 1986 ident: BIB79 publication-title: Z. Phys – volume: 9 start-page: 5008 year: 1974 ident: BIB80 publication-title: Phys. Rev. – volume: 76 start-page: 4428 year: 1996 ident: BIB98 publication-title: Phys. Rev. Lett. – volume: 184 start-page: 383 year: 1969 ident: BIB76 publication-title: Phys. Rev. – volume: 277 start-page: 1237 year: 1997 ident: BIB15 publication-title: Science – volume: 81 start-page: 850 year: 1998 ident: BIB99 publication-title: Phy. Rev. Lett. – volume: 51 start-page: 2427 year: 1995 ident: BIB95 publication-title: Phys. Rev B – volume: 58 start-page: 2710 year: 1991 ident: BIB66 publication-title: Appl. Phys. Lett. – volume: 68 start-page: 3335 year: 1992 ident: BIB114 publication-title: Phys. Rev. B – volume: 380 start-page: 258 year: 1997 ident: BIB110 publication-title: Surf. Sci. – volume: 39 start-page: 5782 year: 1989 ident: BIB32 publication-title: Phys. Rev. B. – volume: 136 start-page: 864 year: 1964 ident: BIB18 publication-title: Phys. Rev. B – volume: 47 start-page: 10142 year: 1993 ident: BIB21 publication-title: Phys. Rev. B – volume: 140 start-page: 1133 year: 1965 ident: BIB19 publication-title: Phys. Rev. A – volume: 59 start-page: 8500 year: 1999 ident: BIB36 publication-title: Phys. Rev. B. – volume: 45 start-page: 4441 year: 1997 ident: BIB50 publication-title: Acta Mater. – volume: 34 start-page: 73 year: 1984 ident: BIB78 publication-title: Appl. Phys. A. – volume: B42 start-page: 7311 year: 1990 ident: BIB87 publication-title: Phys. Rev. – volume: 39 start-page: 7441 year: 1989 ident: BIB28 publication-title: Phys. Rev. B. – volume: 61 start-page: 2472 year: 1988 ident: BIB62 publication-title: Phys. Rev. Lett. – reference: Yang YG, Zhou XW, Wadley HNG. Hyperthermal kinetic Monte Carlo modeling of thin film growth. Surface Science, submitted for publication. – volume: B18 start-page: 321 year: 1987 ident: BIB82 publication-title: Nucl. Instr. Meth – volume: A61 start-page: 39 year: 1995 ident: BIB83 publication-title: Appl. Phys – volume: 84 start-page: 2301 year: 1998 ident: BIB41 publication-title: J. Appl. Phys – volume: 44 start-page: 4747 year: 1991 ident: BIB75 publication-title: Phys. Rev. B. – reference: Rosencrance SW, Burnham JS, Sanders DE, He C, Garrison BJ, Winograd N, Postawa Z, Depristo AE. Phys Rev B 1995;52:6006. – reference: Kohn W. Nobel Laureate in Chemistry for development of the density-functional theory, 1998. – volume: 45 start-page: 1455 year: 1997 ident: BIB46 publication-title: Acta Mater. – year: 1991 ident: BIB77 article-title: Computer simulation of ion–solid interactions – volume: 71 start-page: 6 year: 1992 ident: BIB23 publication-title: Phys. Rev. B – reference: Zhu T. Private communication, 1996. – volume: 355 start-page: L375 year: 1996 ident: BIB106 publication-title: Surf. Sci. – volume: 194 start-page: 353 year: 1998 ident: BIB49 publication-title: Journal of Crystal Growth – start-page: 56 year: 1991 ident: BIB90 article-title: Sputtering by particle bombardment III publication-title: Topics in applied physics vol. 64 – volume: 272 start-page: 204 year: 1992 ident: BIB107 publication-title: Surf. Sci. – volume: 239 start-page: 127 year: 1998 ident: BIB102 publication-title: Phys. Lett A – volume: 50 start-page: 45 year: 1984 ident: BIB27 publication-title: Philos. Mag. A – volume: 431 start-page: 42 year: 1999 ident: BIB39 publication-title: Surf. Sci. – volume: 30 start-page: 3819 year: 1994 ident: BIB67 publication-title: IEEE Transactions on Magnetics – volume: 80 start-page: 2877 year: 1998 ident: BIB93 publication-title: Phys. Rev. Lett. – volume: 120 start-page: 128 year: 1995 ident: BIB53 publication-title: J. Comp. Phys – volume: 538 start-page: 323 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB58 publication-title: Proc. MRS doi: 10.1557/PROC-538-323 – volume: 76 start-page: 4428 year: 1996 ident: 10.1016/S0079-6425(00)00009-8_BIB98 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.76.4428 – volume: 8 start-page: 2264 year: 1992 ident: 10.1016/S0079-6425(00)00009-8_BIB60 publication-title: J. Electrochem doi: 10.1149/1.2221213 – volume: 81 start-page: 2735 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB71 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.81.2735 – volume: 77 start-page: 981 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB38 publication-title: Phil. Mag. A doi: 10.1080/01418619808221223 – volume: 431 start-page: 58 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB40 publication-title: Surf. Sci. doi: 10.1016/S0039-6028(99)00336-2 – volume: 272 start-page: 204 year: 1992 ident: 10.1016/S0079-6425(00)00009-8_BIB107 publication-title: Surf. Sci. doi: 10.1016/0039-6028(92)91440-M – ident: 10.1016/S0079-6425(00)00009-8_BIB64 – ident: 10.1016/S0079-6425(00)00009-8_BIB17 – volume: 51 start-page: 2427 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB95 publication-title: Phys. Rev B doi: 10.1103/PhysRevB.51.2427 – volume: 60 start-page: 399 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB101 publication-title: Appl. Phys. A doi: 10.1007/BF01538341 – volume: 39 start-page: 7441 year: 1989 ident: 10.1016/S0079-6425(00)00009-8_BIB28 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.39.7441 – volume: 62 start-page: 1594 issue: 14 year: 1993 ident: 10.1016/S0079-6425(00)00009-8_BIB59 publication-title: Appl. Phys. Lett. doi: 10.1063/1.108648 – volume: 28 start-page: 2742 issue: 5 year: 1992 ident: 10.1016/S0079-6425(00)00009-8_BIB69 publication-title: IEEE Transaction on Magnetics doi: 10.1109/20.179614 – volume: 45 start-page: 4441 issue: 11 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB43 publication-title: Acta Metall. Mater. doi: 10.1016/S1359-6454(97)00156-0 – volume: 84 start-page: 2301 issue: 4 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB41 publication-title: J. Appl. Phys doi: 10.1063/1.368297 – volume: 140 start-page: 1133 year: 1965 ident: 10.1016/S0079-6425(00)00009-8_BIB19 publication-title: Phys. Rev. A doi: 10.1103/PhysRev.140.A1133 – volume: 377 start-page: 983 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB94 publication-title: Surf. Sci. doi: 10.1016/S0039-6028(96)01554-3 – volume: 355 start-page: L375 year: 1996 ident: 10.1016/S0079-6425(00)00009-8_BIB106 publication-title: Surf. Sci. doi: 10.1016/0039-6028(96)00609-7 – volume: 441 start-page: 541 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB54 publication-title: Materials Research Society Proceedings doi: 10.1557/PROC-441-541 – ident: 10.1016/S0079-6425(00)00009-8_BIB61 – volume: 389 start-page: 95 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB55 publication-title: Materials Research Society Proceedings doi: 10.1557/PROC-389-95 – volume: 9 start-page: 5008 year: 1974 ident: 10.1016/S0079-6425(00)00009-8_BIB80 publication-title: Phys. Rev. doi: 10.1103/PhysRevB.9.5008 – volume: 136 start-page: 864 year: 1964 ident: 10.1016/S0079-6425(00)00009-8_BIB18 publication-title: Phys. Rev. B doi: 10.1103/PhysRev.136.B864 – volume: 349 start-page: L89 year: 1996 ident: 10.1016/S0079-6425(00)00009-8_BIB113 publication-title: Surf. Sci. doi: 10.1016/0039-6028(95)01042-4 – volume: 331 start-page: 902 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB108 publication-title: Surf. Sci. doi: 10.1016/0039-6028(95)00150-6 – volume: B63 start-page: 109 year: 1986 ident: 10.1016/S0079-6425(00)00009-8_BIB79 publication-title: Z. Phys doi: 10.1007/BF01312585 – year: 1996 ident: 10.1016/S0079-6425(00)00009-8_BIB9 – volume: 47 start-page: 1063 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB51 publication-title: Acta Mater. doi: 10.1016/S1359-6454(98)00403-0 – volume: 56 start-page: 10579 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB96 publication-title: Phys. Rev B doi: 10.1103/PhysRevB.56.10579 – volume: 431 start-page: 42 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB39 publication-title: Surf. Sci. doi: 10.1016/S0039-6028(99)00335-0 – volume: 71 start-page: 895 year: 1993 ident: 10.1016/S0079-6425(00)00009-8_BIB111 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.71.895 – volume: 120 start-page: 128 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB53 publication-title: J. Comp. Phys doi: 10.1006/jcph.1995.1153 – volume: 55 start-page: 2471 year: 1985 ident: 10.1016/S0079-6425(00)00009-8_BIB20 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.55.2471 – ident: 10.1016/S0079-6425(00)00009-8_BIB4 doi: 10.1126/science.284.5421.1819 – volume: 253 start-page: 334 year: 1991 ident: 10.1016/S0079-6425(00)00009-8_BIB47 publication-title: Surf. Sci. doi: 10.1016/0039-6028(91)90604-Q – volume: 27 start-page: 763 year: 1961 ident: 10.1016/S0079-6425(00)00009-8_BIB74 publication-title: Physica doi: 10.1016/0031-8914(61)90093-3 – volume: 4 start-page: 219 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB103 publication-title: Surf. Rev. Lett. doi: 10.1142/S0218625X97000213 – year: 1991 ident: 10.1016/S0079-6425(00)00009-8_BIB77 – year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB14 – volume: 59 start-page: 8500 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB36 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.59.8500 – volume: 277 start-page: 1237 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB15 publication-title: Science doi: 10.1126/science.277.5330.1237 – ident: 10.1016/S0079-6425(00)00009-8_BIB42 doi: 10.1063/1.373568 – volume: B18 start-page: 321 year: 1987 ident: 10.1016/S0079-6425(00)00009-8_BIB82 publication-title: Nucl. Instr. Meth – volume: 298 start-page: 173 year: 1993 ident: 10.1016/S0079-6425(00)00009-8_BIB118 publication-title: Surf. Sci. doi: 10.1016/0039-6028(93)90093-Y – year: 1994 ident: 10.1016/S0079-6425(00)00009-8_BIB1 – ident: 10.1016/S0079-6425(00)00009-8_BIB63 – volume: 71 start-page: 6 year: 1992 ident: 10.1016/S0079-6425(00)00009-8_BIB23 publication-title: Phys. Rev. B – volume: 61 start-page: 2472 year: 1988 ident: 10.1016/S0079-6425(00)00009-8_BIB62 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.61.2472 – volume: 380 start-page: 258 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB110 publication-title: Surf. Sci. doi: 10.1016/S0039-6028(96)01573-7 – volume: 30 start-page: 3819 issue: 6 year: 1994 ident: 10.1016/S0079-6425(00)00009-8_BIB67 publication-title: IEEE Transactions on Magnetics doi: 10.1109/20.333913 – volume: 72 start-page: 3843 year: 1994 ident: 10.1016/S0079-6425(00)00009-8_BIB117 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.72.3843 – ident: 10.1016/S0079-6425(00)00009-8_BIB10 – volume: 77 start-page: 2993 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB91 publication-title: J. Appl. Phys. doi: 10.1063/1.359565 – year: 1993 ident: 10.1016/S0079-6425(00)00009-8_BIB2 – volume: 36 start-page: 3542 year: 1965 ident: 10.1016/S0079-6425(00)00009-8_BIB70 publication-title: J. Appl. Phys doi: 10.1063/1.1703035 – volume: 239 start-page: 127 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB102 publication-title: Phys. Lett A doi: 10.1016/S0375-9601(97)00960-2 – volume: 45 start-page: 1513 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB89 publication-title: Acta Mater doi: 10.1016/S1359-6454(96)00283-2 – ident: 10.1016/S0079-6425(00)00009-8_BIB52 – volume: 349 start-page: L89 year: 1996 ident: 10.1016/S0079-6425(00)00009-8_BIB112 publication-title: Surf. Sci. doi: 10.1016/0039-6028(95)01023-8 – volume: 39 start-page: 5782 year: 1989 ident: 10.1016/S0079-6425(00)00009-8_BIB32 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.39.5792 – ident: 10.1016/S0079-6425(00)00009-8_BIB88 doi: 10.1103/PhysRevB.52.6006 – volume: 29 start-page: 2963 year: 1984 ident: 10.1016/S0079-6425(00)00009-8_BIB30 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.29.2963 – volume: 194 start-page: 353 issue: 3–4 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB49 publication-title: Journal of Crystal Growth doi: 10.1016/S0022-0248(98)00685-X – volume: 58 start-page: 2710 issue: 23 year: 1991 ident: 10.1016/S0079-6425(00)00009-8_BIB66 publication-title: Appl. Phys. Lett. doi: 10.1063/1.104765 – volume: 58 start-page: 1200 year: 1980 ident: 10.1016/S0079-6425(00)00009-8_BIB22 publication-title: Can. J. Phys. Chem. – ident: 10.1016/S0079-6425(00)00009-8_BIB45 – volume: 39 start-page: 12554 year: 1989 ident: 10.1016/S0079-6425(00)00009-8_BIB29 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.39.12554 – ident: 10.1016/S0079-6425(00)00009-8_BIB13 – volume: 41 start-page: 6240 year: 1989 ident: 10.1016/S0079-6425(00)00009-8_BIB73 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.41.6240 – volume: 184 start-page: 383 year: 1969 ident: 10.1016/S0079-6425(00)00009-8_BIB76 publication-title: Phys. Rev. doi: 10.1103/PhysRev.184.383 – start-page: 56 year: 1991 ident: 10.1016/S0079-6425(00)00009-8_BIB90 article-title: Sputtering by particle bombardment III – volume: 32 start-page: 142 issue: 1 year: 1996 ident: 10.1016/S0079-6425(00)00009-8_BIB7 publication-title: IEEE Transactions on Magnetics doi: 10.1109/20.477564 – volume: 285 start-page: 703 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB11 publication-title: Science doi: 10.1126/science.285.5428.703 – volume: B122 start-page: 427 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB81 publication-title: Nucl. Instr. Meth. Phys. Res. doi: 10.1016/S0168-583X(96)00681-7 – ident: 10.1016/S0079-6425(00)00009-8_BIB48 – ident: 10.1016/S0079-6425(00)00009-8_BIB65 – volume: 32 start-page: 7685 year: 1985 ident: 10.1016/S0079-6425(00)00009-8_BIB85 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.32.7685 – volume: 45 start-page: 4441 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB50 publication-title: Acta Mater. doi: 10.1016/S1359-6454(97)00156-0 – volume: 88 start-page: 321 year: 1987 ident: 10.1016/S0079-6425(00)00009-8_BIB6 publication-title: Materials Science and Engineering doi: 10.1016/0025-5416(87)90101-7 – volume: B42 start-page: 7311 year: 1990 ident: 10.1016/S0079-6425(00)00009-8_BIB87 publication-title: Phys. Rev. doi: 10.1103/PhysRevB.42.7311 – volume: 285 start-page: 692 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB5 publication-title: Science doi: 10.1126/science.285.5428.692 – ident: 10.1016/S0079-6425(00)00009-8_BIB16 – volume: 330 start-page: 101 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB115 publication-title: Surf. Sci. doi: 10.1016/0039-6028(95)00401-7 – ident: 10.1016/S0079-6425(00)00009-8_BIB86 doi: 10.1007/978-3-642-48375-2 – volume: 41 start-page: 7892 year: 1990 ident: 10.1016/S0079-6425(00)00009-8_BIB24 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.41.7892 – volume: 47 start-page: 10142 year: 1993 ident: 10.1016/S0079-6425(00)00009-8_BIB21 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.47.10142 – volume: 6 start-page: 33 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB12 publication-title: Physics Today doi: 10.1063/1.882695 – volume: A61 start-page: 39 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB83 publication-title: Appl. Phys doi: 10.1007/BF01538208 – volume: 538 start-page: 529 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB37 publication-title: Materials Research Society Proceedings doi: 10.1557/PROC-538-529 – volume: 59 start-page: 8500 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB34 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.59.8487 – volume: 68 start-page: 3335 year: 1992 ident: 10.1016/S0079-6425(00)00009-8_BIB114 publication-title: Phys. Rev. B doi: 10.1103/PhysRevLett.68.3335 – volume: 34 start-page: 73 year: 1984 ident: 10.1016/S0079-6425(00)00009-8_BIB78 publication-title: Appl. Phys. A. doi: 10.1007/BF00614759 – volume: 50 start-page: 45 year: 1984 ident: 10.1016/S0079-6425(00)00009-8_BIB27 publication-title: Philos. Mag. A doi: 10.1080/01418618408244210 – volume: 35 start-page: 2169 year: 1987 ident: 10.1016/S0079-6425(00)00009-8_BIB31 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.35.2169 – volume: 126 start-page: 419 year: 1993 ident: 10.1016/S0079-6425(00)00009-8_BIB68 publication-title: J. Magnetism and Magnetic Materials doi: 10.1016/0304-8853(93)90643-G – volume: 5 start-page: 22 issue: 3 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB3 publication-title: The Industrial Physicist – volume: 29 start-page: 6443 year: 1984 ident: 10.1016/S0079-6425(00)00009-8_BIB26 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.29.6443 – volume: 365 start-page: 205 year: 1996 ident: 10.1016/S0079-6425(00)00009-8_BIB116 publication-title: Surf. Sci. doi: 10.1016/0039-6028(96)00712-1 – volume: B102 start-page: 281 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB84 publication-title: Nucl. Instr. Meth doi: 10.1016/0168-583X(95)80155-F – volume: 67 start-page: 335 year: 1992 ident: 10.1016/S0079-6425(00)00009-8_BIB33 publication-title: Nucl. Inst. Meth. Phys. Rev. B doi: 10.1016/0168-583X(92)95829-G – volume: 8 start-page: 6142 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB92 publication-title: J. Appl. Phys doi: 10.1063/1.365620 – volume: 73 start-page: 2448 year: 1994 ident: 10.1016/S0079-6425(00)00009-8_BIB97 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.73.2448 – ident: 10.1016/S0079-6425(00)00009-8_BIB25 – year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB35 – volume: 80 start-page: 2877 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB93 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.80.2877 – volume: 17 start-page: 1926 issue: 4 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB57 publication-title: JVST A – volume: 57 start-page: 10054 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB104 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.57.10054 – volume: 34 start-page: 153 year: 1963 ident: 10.1016/S0079-6425(00)00009-8_BIB72 publication-title: J. Appl. Phys doi: 10.1063/1.1729057 – volume: 55 start-page: r16061 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB100 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.55.R16061 – volume: 398 start-page: 134 year: 1999 ident: 10.1016/S0079-6425(00)00009-8_BIB119 publication-title: Nature doi: 10.1038/18185 – volume: 34 start-page: 1883 issue: 19 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB8 publication-title: Electron Lett. doi: 10.1049/el:19981278 – volume: 528 start-page: 221 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB44 publication-title: Materials Research Society Proceedings doi: 10.1557/PROC-528-221 – volume: 51 start-page: 14790 year: 1995 ident: 10.1016/S0079-6425(00)00009-8_BIB105 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.51.14790 – volume: 45 start-page: 1455 issue: 4 year: 1997 ident: 10.1016/S0079-6425(00)00009-8_BIB46 publication-title: Acta Mater. doi: 10.1016/S1359-6454(96)00256-X – volume: 71 start-page: 2437 year: 1993 ident: 10.1016/S0079-6425(00)00009-8_BIB109 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.71.2437 – volume: 81 start-page: 850 year: 1998 ident: 10.1016/S0079-6425(00)00009-8_BIB99 publication-title: Phy. Rev. Lett. doi: 10.1103/PhysRevLett.81.850 – ident: 10.1016/S0079-6425(00)00009-8_BIB56 – volume: 44 start-page: 4747 year: 1991 ident: 10.1016/S0079-6425(00)00009-8_BIB75 publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.44.4747
SSID	ssj0007109
Score	2.1374264
SecondaryResourceType	review_article
Snippet	The condensation and assembly of atomic fluxes incident upon the surface of a thin film during its growth by vapor deposition is complex. Mediating the growth...
SourceID	pascalfrancis crossref elsevier
SourceType	Index Database Enrichment Source Publisher
StartPage	329
SubjectTerms	Applied sciences Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Metals. Metallurgy Methods of deposition of films and coatings; film growth and epitaxy Physics Theory and models of film growth
Title	Mechanisms, models and methods of vapor deposition
URI	https://dx.doi.org/10.1016/S0079-6425(00)00009-8
Volume	46
WOSCitedRecordID	wos000167751900010&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D
hasFullText	1
inHoldings	1
isFullTextHit
isPrint
journalDatabaseRights	– providerCode: PRVESC databaseName: Elsevier SD Freedom Collection Journals 2021 customDbUrl: eissn: 1873-2208 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0007109 issn: 0079-6425 databaseCode: AIEXJ dateStart: 19950101 isFulltext: true titleUrlDefault: https://www.sciencedirect.com providerName: Elsevier
link	http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1bb9MwFLagAwmEuBQQg4HywAOopDhOUtuP1RgqINKJbVLFS5T4IlVCWbWUaT-f40viDASDB6Qqqlwlrnw-n_P55LMPQi9pWueaJComlUndJBWNOclhzSMw43WWcUJcsQlaFGy14odeNtbacgK0adjFBd_8V1NDGxjbbJ39B3P3D4UG-A5GhyuYHa5_ZfjPymzmXbcuh2Ir3bhzmF2xaCvdOK-AdhsVrJdsDSnqoVFsGf-3biZAZ91fnvhI2fvw-TtgtjZuTSfFNFTo-rpYnpjmVS_NWS6Ko6UVE3yZhsxpYSSE-59CPrbLPIScQ7cZZuhYKY9hKZMPHavPLa4vbeZxfjL1aQ4XclNXyeUXb-4SC0f9w4Fzm9LV3BLbmIUQ1r22_ymy9XpDA7-EXUc7hOacjdDO_MPB6mMfsY0e1UZs30_Y6fU2dP4K49e-499xmDubqoWZpV1JlAFPOb6P7voFRjR3wHiArqlmjO75xUbkXXk7RrcHJ1GO0U2rBBbtQ0QCft5EDj0RoCfy6IlOdWTREwX0PEIn7w-O9xexL6wRizTNt3EtqUrUDHMlla4YZzrPFSFYzqiWpFKCapbVGcMznRCiBDCWTGR5zXRNJEzs9DEaNaeNeoIiLRUlTFZZkgE3FQnDWuR1IjVmUsBSdBdl3VCVwp86b4qffCuDvBBGuDQjXGJzVC2McMl20bS_beOOXbnqBtbZofQzwnHCEsB01a17l-zWd-hQ8_TPPz9Dt5ws0Xz20Gh79l09RzfE-Xbdnr3wSPsB8G6MEQ
linkProvider	Elsevier
openUrl	ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Mechanisms%2C+models+and+methods+of+vapor+deposition&rft.jtitle=Progress+in+materials+science&rft.au=WADLEY%2C+H.+N.+G&rft.au=ZHOU%2C+X&rft.au=JOHNSON%2C+R.+A&rft.au=NEUROCK%2C+M&rft.date=2001&rft.pub=Elsevier&rft.issn=0079-6425&rft.volume=46&rft.issue=3-4&rft.spage=329&rft.epage=377&rft_id=info:doi/10.1016%2FS0079-6425%2800%2900009-8&rft.externalDBID=n%2Fa&rft.externalDocID=925218
thumbnail_l	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0079-6425&client=summon
thumbnail_m	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0079-6425&client=summon
thumbnail_s	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0079-6425&client=summon