Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage

Iterative control enables a significant control performance enhancement by learning feedforward command signals from previous tasks in a batch‐to‐batch fashion. The aim of this paper is to develop an approach to estimate the parameters of rational feedforward controllers that provide high performanc...

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Vydané v:	Asian journal of control Ročník 20; číslo 3; s. 975 - 992
Hlavní autori:	Boeren, Frank, Blanken, Lennart, Bruijnen, Dennis, Oomen, Tom
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	Hoboken Wiley Subscription Services, Inc 01.05.2018
Predmet:	Actuation Computer simulation Control systems Control theory Controllers Economic models Feedforward control learning control mechatronics Parameter estimation Performance enhancement
ISSN:	1561-8625, 1934-6093
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