Synchronous Raman Spectroscopy Method for Measuring Strain-Charge Information of Graphene Materials

Background How to obtain deformation and charge information through in situ measurement of nanomaterial devices is a new and challenging problem, which are related in performance design and failure prevention. Objective To accurately measure the electro-mechanical influence on microelectronic device...

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Bibliographic Details
Published in:Experimental mechanics Vol. 63; no. 7; pp. 1193 - 1202
Main Authors: Hong, C., Song, H., Kang, Y., Xie, H., Qiu, W., Du, H., Han, B.
Format: Journal Article
Language:English
Published: New York Springer US 01.09.2023
Springer Nature B.V
Subjects:
Annealing
Approximation
Approximation method
Biomedical Engineering and Bioengineering
Characterization and Evaluation of Materials
Charge density
Control
Copper
Deformation
Dynamical Systems
Electric fields
Electrodes
Electron microscopes
Electronic devices
Engineering
Failure prevention
Graphene
In situ measurement
Lasers
Lithium
Measurement methods
Measurement techniques
Nanomaterials
Optical Devices
Optics
Oxidation
Photonics
Raman spectroscopy
Research Paper
Shear stress
Solid Mechanics
Spectroscopic analysis
Spectroscopy
Spectrum analysis
Strain
Vibration
ISSN:0014-4851, 1741-2765
Online Access:Get full text
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Summary:Background How to obtain deformation and charge information through in situ measurement of nanomaterial devices is a new and challenging problem, which are related in performance design and failure prevention. Objective To accurately measure the electro-mechanical influence on microelectronic devices, research on an in situ measurement method based on Raman spectroscopy is carried out. Methods Two analytical models are derived: the doublet vector method and the spectral approximation method. Then, a graphene electrode experiment is used to carry out synchronous in situ measurement of strain and charge density. Experimental data are further used to compare and analyze the approximation levels of the spectral approximation method under electro-mechanical field effect. Results The results show that when both strain and charge exist and one factor is very weak, the relative difference between the results of the doublet vector method and doublet approximation method, which considers both electrical and mechanical factors, is smaller. Conclusions The methods mentioned above can realize synchronous and separate measurement of graphene electronic devices, which can also provide methods for measuring and controlling the electromechanical properties of new-type electronic devices’ electro-mechanical information.
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ISSN:0014-4851
1741-2765
DOI:10.1007/s11340-023-00983-6