Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications

Mueller matrix ellipsometry (MME) provides the 4×4 Mueller matrix of a sample under test, which determines how the state of polarization is changed as light interacts with the sample. Due to the redundant information contained in the Mueller matrix, MME has gained more and more extensive application...

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Bibliographic Details

Published in:	Science China. Technological sciences Vol. 65; no. 9; pp. 2007 - 2030
Main Authors:	Chen, XiuGuo, Gu, HongGang, Liu, JiaMin, Chen, Chao, Liu, ShiYuan
Format:	Journal Article
Language:	English
Published:	Beijing Science China Press 01.09.2022 Springer Nature B.V
Subjects:	Broadband Data analysis Ellipsometry Engineering Image resolution Instruments Review Thin films Mueller matrix ellipsometry Mueller matrix ellipsometry imaging ellipsometry high-speed ellipsometry
ISSN:	1674-7321, 1869-1900
Online Access:	Get full text
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