Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications

Mueller matrix ellipsometry (MME) provides the 4×4 Mueller matrix of a sample under test, which determines how the state of polarization is changed as light interacts with the sample. Due to the redundant information contained in the Mueller matrix, MME has gained more and more extensive application...

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Bibliographic Details
Published in:Science China. Technological sciences Vol. 65; no. 9; pp. 2007 - 2030
Main Authors: Chen, XiuGuo, Gu, HongGang, Liu, JiaMin, Chen, Chao, Liu, ShiYuan
Format: Journal Article
Language:English
Published: Beijing Science China Press 01.09.2022
Springer Nature B.V
Subjects:
Broadband
Data analysis
Ellipsometry
Engineering
Image resolution
Instruments
Review
Thin films
Mueller matrix
ellipsometry
Mueller matrix ellipsometry
imaging ellipsometry
high-speed ellipsometry
ISSN:1674-7321, 1869-1900
Online Access:Get full text
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Summary:Mueller matrix ellipsometry (MME) provides the 4×4 Mueller matrix of a sample under test, which determines how the state of polarization is changed as light interacts with the sample. Due to the redundant information contained in the Mueller matrix, MME has gained more and more extensive applications in the characterization of surfaces, interfaces, thin films, and nanostructures. In addition, the instrumentation of MME has also achieved great developments since its advent in the 1970s. In this paper, we will first review the basic principle as well as the common system layouts of MME for the full Mueller matrix measurement. Then, the basic procedure of ellipsometry data analysis is reviewed. After that, some new developments in MME in our lab for different applications are introduced, including the broadband MME, the high-resolution imaging MME, and the high-speed MME. Some emerging applications of the developed MMEs are also presented. Conclusions and perspectives of the advanced ellipsometry are finally drawn and discussed.
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ISSN:1674-7321
1869-1900
DOI:10.1007/s11431-022-2090-4