Physical vapor deposition technology for coated cutting tools: A review

Due to various difficult-to-machine materials and increasingly severe machining conditions, more and more attention has been paid to the physical vapor deposition (PVD) technology in recent decades to deposit hard coatings on cutting tools. Combined with the status of industrial application of PVD t...

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Veröffentlicht in:	Ceramics international Jg. 46; H. 11; S. 18373 - 18390
Hauptverfasser:	Deng, Yang, Chen, Wanglin, Li, Bingxin, Wang, Chengyong, Kuang, Tongchun, Li, Yanqiu
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	Elsevier Ltd 01.08.2020
Schlagworte:	Arc evaporation Coated cutting tool Hybrid technology Magnetron sputtering Plasma etching Coated cutting tool Hybrid technology Magnetron sputtering Arc evaporation Plasma etching
ISSN:	0272-8842, 1873-3956
Online-Zugang:	Volltext
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Abstract	Due to various difficult-to-machine materials and increasingly severe machining conditions, more and more attention has been paid to the physical vapor deposition (PVD) technology in recent decades to deposit hard coatings on cutting tools. Combined with the status of industrial application of PVD technology, this paper reviews the main PVD techniques for coated cutting tools from the perspective of the overall PVD coating equipment, including cathodic arc evaporation and magnetron sputtering as well as their hybrid techniques, and the plasma etching which is critical for coating adhesion strength is also involved. With regard to hard coating deposition on cutting tools, the basic principle, cathode configuration, magnetron and power supply are outlined. Issues related to target ionization ratio, coating deposition rate, coating properties and industrial application of numerous PVD techniques are also highlighted. On plasma etching, inert gas ion etching and metal ions etching are discussed. Finally, this paper summarizes and prospects the PVD technology used for coated cutting tools.
AbstractList	Due to various difficult-to-machine materials and increasingly severe machining conditions, more and more attention has been paid to the physical vapor deposition (PVD) technology in recent decades to deposit hard coatings on cutting tools. Combined with the status of industrial application of PVD technology, this paper reviews the main PVD techniques for coated cutting tools from the perspective of the overall PVD coating equipment, including cathodic arc evaporation and magnetron sputtering as well as their hybrid techniques, and the plasma etching which is critical for coating adhesion strength is also involved. With regard to hard coating deposition on cutting tools, the basic principle, cathode configuration, magnetron and power supply are outlined. Issues related to target ionization ratio, coating deposition rate, coating properties and industrial application of numerous PVD techniques are also highlighted. On plasma etching, inert gas ion etching and metal ions etching are discussed. Finally, this paper summarizes and prospects the PVD technology used for coated cutting tools.
Author	Kuang, Tongchun Deng, Yang Li, Bingxin Li, Yanqiu Chen, Wanglin Wang, Chengyong
Author_xml	– sequence: 1 givenname: Yang surname: Deng fullname: Deng, Yang organization: School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, 510006, China – sequence: 2 givenname: Wanglin surname: Chen fullname: Chen, Wanglin organization: School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, 510006, China – sequence: 3 givenname: Bingxin surname: Li fullname: Li, Bingxin organization: School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, 510006, China – sequence: 4 givenname: Chengyong surname: Wang fullname: Wang, Chengyong email: cywang@gdut.edu.cn organization: School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, 510006, China – sequence: 5 givenname: Tongchun surname: Kuang fullname: Kuang, Tongchun organization: School of Materials Science and Engineering, South China University of Technology, Guangzhou, 510640, China – sequence: 6 givenname: Yanqiu surname: Li fullname: Li, Yanqiu organization: School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, 510006, China
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ParticipantIDs	crossref_citationtrail_10_1016_j_ceramint_2020_04_168 crossref_primary_10_1016_j_ceramint_2020_04_168 elsevier_sciencedirect_doi_10_1016_j_ceramint_2020_04_168
PublicationCentury	2000
PublicationDate	2020-08-01 2020-08-00
PublicationDateYYYYMMDD	2020-08-01
PublicationDate_xml	– month: 08 year: 2020 text: 2020-08-01 day: 01
PublicationDecade	2020
PublicationTitle	Ceramics international
PublicationYear	2020
Publisher	Elsevier Ltd
Publisher_xml	– name: Elsevier Ltd
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Snippet	Due to various difficult-to-machine materials and increasingly severe machining conditions, more and more attention has been paid to the physical vapor...
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SubjectTerms	Arc evaporation Coated cutting tool Hybrid technology Magnetron sputtering Plasma etching
Title	Physical vapor deposition technology for coated cutting tools: A review
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