Model-based thickness estimation of multilayer films in picosecond ultrasonics metrology with aliased echoes

•The thickness estimation method aims at the case of a part of echoes aliasing in picosecond ultrasonics.•A theoretical model of the spectrum relationship between echo-signal regions is constructed.•Simulations are conducted and yield ways to reduce noise impact.•Estimation errors for the tested W/A...

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Bibliographic Details

Published in:	Applied acoustics Vol. 228; p. 110272
Main Authors:	Min, Jing, Chen, Xiuguo, Liu, Shiyuan, Wang, Zhongyu, Sun, Yong, Wang, Xuesong, Tang, Zirong
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 15.01.2025
Subjects:	Inversion algorithm Picosecond ultrasonics Spectrum analysis Submicron multilayer films Thickness estimation Thickness estimation Picosecond ultrasonics Submicron multilayer films Spectrum analysis Inversion algorithm
ISSN:	0003-682X
Online Access:	Get full text
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